5 Port Air Operated Valve Series SYA3000/5000/7000 1

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-22 5 Series SYJA5000 4/5 Port Air Operated Valve Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 2 position

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

MHZ

Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed No setting No setting MHZ2-6 1 7.5 6 4 1 3 2 6.5 5 3 2 1 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting

MHZ

No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting MHZJ2-10 No setting No setting MHZJ2-16 3 2

Tie-rod Type Hydraulic Cylinder

50 19 50 25 9 73 17 M10 x 1.5 20 M16 x 1.5 10 9 53 20 13 16 11 28 22 3/8 17 30 26 43 112 5 63 21 55 28 8 80 17 M10 x 1.5 22 M18 x 1.5 12 10 60 22.4 13 16 11 30 25 3/8 17 30 26 47 116 5 80 26 65 M12 x 1.75 32 8 100 20 26 M22 x 1.5 16 13 75 28 15 19 11 32 29 1/2 22 35 30 57 127 5 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 19 27 20 16 90 35.5 16 21 12 35 34 1/2 27 35 32 66 137 8 125 34 80 M14 x

CY1

CY1B40L 0.95 CY1B50H 3.12 50 CY1B50L 1.83 CY1B63H 5.07 63 CY1B63L 3.09 Contact SMC before using fittings which exceed the above weights. 5 Series CY1B 6 Series CY1B Magnetic Rodless Cylinder Basic Type Dimensions Basic type CY1B6, 10, 15 (mm) MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 M4 x 0.7 x 6 D 7.6 12 17 B 17 25 35 F 9 9 10 G 5 5 5.5 H 14 12.5 13 K 5 4 11 L 35 38 57 N 10 11 11 NA 14 14 17

CNA

D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34 50 34 34 34 35 38.5 47 10.5 9.5 9 7 8 38 MLGP 41 63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Battery-less

5 r t w q y !6 !

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

HRX-OM-X084

Standard setting menu . 5-8 5.3.6 Alarm Setting Menu . 5-9 5.3.7 Communication setting menu . 5-10 5.3.8 Reset menu . 5-11 5.3.9 Information Monitor Setting Menu . 5-11 5.4 Basic setting mode . 5-12 5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CLA

14 113 21 30 72 80 750 20-750 23 17 M12X1 .75 11 M22X 1. 5 100 -750 20750 37 40 11 6 140 V 'I.. 92 30 52 14 124 21 31 76 25 19 M12X 1.75 11 M26X1 .5 IBore Size (mm) MM X1US N Without Boot With BootLZ H ZZ ee f h !

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CM2

12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

-5-2 11-5-3 3 Series MSU Precautions Be sure to read before handling.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance