Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28 PRESSURE 10 33.5 42.4 30 56 44 OUT1 OUT2 SET 5 6 7 8 16 4.5 (Max. 8) 11

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Double acting/Single acting (spring extended) Action Fluid Proof pressure 1.05MPa (150psi) Air 0.15 (22psi) 0.1(14.5psi) Double acting Single acting (spring extended) Min. operating pressure MPa 0.35 (50psi) 0.3 (44psi) 0.2 (29psi) Max. operating pressure 0.7MPa (101.5psi) Without auto switch: 10C to 70C (14 to 158F) (with no freezing) With auto switch: 10C to 60C (14 to 140F) (with no freezing

(valve open/closed), Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

(valve open/closed), Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

(valve open/closed), Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

Table of Contents

11 !2 !33 !4 !5 !

4/5 Port Solenoid Valve

11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43

SY

SS5Y31, #2 + #11 M type plug connector .

CM2

SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8

Dual Rod Cylinder Series CXSJ/CXS

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/1286 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS32, CXSL32 10-/11221221Air cylinder

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

LEC-OM071xx

DISCONNECT 11 Turn OFF the control and main circuit power supplies.

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

LEC-OM069xx

DISCONNECT 11 Turn off the control and main circuit power supplies.

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).