CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

Fieldbus system EtherNet/IP compatible SI Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

Thermo-chiller

Polyester band Forklift insertion side Cardboard box 800 mm Less than 150 mm 300 mm or more or more Wooden skid Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRLE050-A-20 150 Height 1320 x Width 580 x Depth 1240 HRLE050-W-20 143 HRLE090-A-20/40 176 HRLE090-W-20/40 170 300 mm or more 500 mm or more 2. Transporting with forklift 1.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

39

A002 CKZ Arm 63 Arm code (Refer to page 3 and 8 through to 11.)

IZx-OMR0035

100 V) IZF21-W IZF31-W 300 mm 300 mm 2sec 4sec 6sec 8sec 0 2sec 4sec 6sec 8sec 0 -300 mm -300 mm 0 400 800 1200 1600 2000 2400 2800 0 400 800 1200 1600 2000 Installation distance mm Installation distance mm 29 Doc.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

1 min. between external terminal and case Insulation resistance 50M or more (500 VDC Mega) between external terminal and case 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. 4.9 m/s2 Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g

0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

HRX-OM-I051

Recommended torque: 12.5 Nm (9.22 ft-lbf) Grounding terminal Earth bar Main breaker Figure 3-11 Connection of Power Cable and Grounding Terminal [Tips] See Table 3-1 Power Cable and Main Breaker (This System) on page 3-8 for torque value. 9. Attach the breaker cover to the breaker. 10. Attach the front panel. 11.

Multistage Ejector Series ZL112.212

(OUT1: Green, OUT2: Red) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating/Stored: 35 to 85% RH (No condensation) 1000 VAC for 1 minute between live parts and case 50 M or more between live parts and case (at 500 VDC Mega) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each 100 m/s2, in

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

Heavy Duty Stopper Cylinder Series RSH/RS1H

DC (+) Brown Main switch circuit OUT Black Auto Switch Weights Unit: g DC (s) Blue D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Model 0.5 11 11 11 Lead wire length m 3 54 54 54 D-Y7PW, Y7PWV 5 88 88 88 DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw DC (s) Blue Indicator light 3.4 2.5 SMC SMC 6.2 5 D-Y7BW, Y7BWV 29 OUT (+) Brown Main switch

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

5 Port Solenoid Valve

(12.5) 2(B) port 11 (12.5) 4(A) port Indicator light 50 59 73 106 165 179 2 Indicator light 2 4 90 24.6 38 48 11 (12.5) 4(A) port 11 (12.5) 2(B) port B A 14 12 1 5 3 4 2 Manual override 30 45 38 24.6 A B 2 x 5.6 Mounting hole 48 B A 14 12 5 3 1 45 30 2 x 5.6 Mounting hole Manual override 129 91.5 41.3 32 30.6 27 14.5 G1/2 78.8 41.3 32 30.6 27 14.5 Electrical entry PE X X PE R1 R2 15.5 P

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

Water-cooledThermo-chiller

-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19