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No.SFOD-OMO0004-B PRODUCT NAME Electrostatic Sensor Monitor MODEL/ Series IZE11 Table of Contents Safety Instructions 2 Model Identification and How to Order 7 Summary of Product parts 8 Mounting and Installation 10 Installation 10 Wiring 11 Setting 14 Measurement mode 15 Function selection mode 18 Default setting 18 F0 Select connect sensor 19 F1 Operation of OUT1 20 F2 Operation of OUT2

IN of filtered fluid (Port size: R1 or R2) Access to In pressure (Port size: Rp1/4) Access to Out pressure (Port size: Rp1/4) DRAIN Port to discharge accumulated fluid and drain at inlet when replacing the element. (Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1.

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

Compatible cable Cord O.D.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

Install manually controlled equipment for safety when the actuator has to be reset to the starting position. (11) Do not use the product as a shock absorber.

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: S2 (100W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2 (2m)

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: 100W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2m, Driver Type: -, I/O Connector: -

Also, since the SQ1000 4-position dual 3-port valve is a 4-port valve specification (R1 and R2 are common), one back pressure check valve can be installed. As a result, back pressure from valves in other stations can be prevented, but back pressure inside this valve cannot be prevented. 1.

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

The NCA1 expanded line of medium duty cylinders offer bore sizes ranging from 5 to 8 inches, and come standard with adjustable air cushion.5in. bore medium duty air cylinder, 11 NFPA mounting options, Standard with adjustable air cushion, Auto switch capable, FLANGE MOUNT KIT, ACTUATOR, NCA1 TIE-ROD CYLINDER, R2, 3.25 INCH NCA1 KIT/ACCESSORY, .76769 lb

The NCA1 expanded line of medium duty cylinders offer bore sizes ranging from 5 to 8 inches, and come standard with adjustable air cushion.5in. bore medium duty air cylinder, 11 NFPA mounting options, Standard with adjustable air cushion, Auto switch capable, DETACH REAR CLEVIS MOUNT KIT, ACTUATOR, NCA1 TIE-ROD CYLINDER, R2, 3.25 INCH NCA1 KIT/ACCESSORY, .77872 lb