Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

JXCx-OMY0008

Movement Speed Position Acceleration Trigger LV Area 1 Area 2 In pos Deceleration force speed force mm/s2 mode mm/s (mm) mm/s2 % (mm) (mm) (mm) % mm/s % 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -38No.

LEYx-OMZ0015

500 250 305 to 400 600 300 150 Maximum Speed Range 405 to 500 800 400 200 640 320 160 of 70 Note3) [mm/s] 505 to 600 800 400 200 stroke 605 to 700 600 300 150 705 to 800 500 250 125 Pushing speed [mm/s] Note4) 35 or less 30 or less 30 or less acceleration/deceleration [mm/s2] 5,000 5,000 5,000 3,000 Positioning repeatability [mm] 0.02[Basic type] / 0.01[High precision type] Lost motion[mm

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82 54 4 55 75 23 27 7 5 66 36 10 15 30 The dimensions other than indicated below are the same as those of indicated on p.3.4-8.

2/3 Port Valve

15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320

Series KV2 Fittings

Green Gray Tan S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S Color Indication Color S S S Color Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

Digital Flow Switch ( compatible)

) [ 100] 100 L/min (2000 L type) [F 1] Page 39 [H_1 ] Hysteresis of OUT1 [dtH1] ON delay time [0.00] 0.00 s [dtL1] OFF delay time [0.00] 0.00 s [ CoL] Display colour of OUT1 [1SoG] Green when ON, Red when OFF (OUT1) [oUt2] Output mode of OUT2 [ HYS] Hysteresis mode [2ot ] Switch operation of OUT2 [ 2_P] Normal output 50% of maximums rated flow range [ 250] 250 L/min (500 L type) [ 500] 500

Digital Flow Switch ( compatible)

L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_1 ] Set value of OUT1 [F 1] Page 35 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [H_1 ] Hysteresis of OUT1 [dtH1] ON delay time [0.00] 0.00 s [dtL1] OFF delay time [0.00] 0.00 s [ CoL] Display colour of OUT1 [1SoG] Green when ON, Red when OFF

IP8001 Series

/ fully-open setting will follow the input value (S value).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

300 300 500 300 10 15 30 54 4 55 75 23 27 7 5 66 36 82 7 30 134 3.2 10 171 52 47.3 45 143 39 11 18 177 188 10 11 53 53 77 44.5 143.5 154 154 MGF The dimensions other than indicated below are the same as those of indicated on p.3.8-8.

Card Motor

Time [s] ta td tc Acceleration time: ta = Vc / Aa [s] Deceleration time: td = Vc / Ad [s] Acceleration distance: Sa = 0.5 x Aa x ta2 [mm] Deceleration distance: Sd = 0.5 x Ad x ta2 [mm] Distance with constant velocity: Sc = S Sa Sd [mm] Time with constant velocity: tc = Sc / Vc [s] Positioning time: tp = ta + tc + td [s] tp 0 3.5 7.0 10.6 14.1 17.6 oz 70,000 Maximum acceleration/deceleration

PFxx-OMA1007

Wireless communication timeout 0.1 s/0.2 s/0.5 s/1 s/2 s/5 s 500 ms Base -46No.PF-OMA1007-B Item Definition Setting range Default settings Effective range Setting target Parameter [EXA1-20] 5 to 525 L/min [EXA1-20] 25 L/min Common Sets the standby flow rate (threshold value).

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Conformed standard Cable length Connector model 300 m/s2 Impact resistance S M L A B D 0.5 m 1.0 m 3.0 m M8-3 pin M8-4 pin M12-4 pin IP-67 (IEC60529 standard) Enclosure 100 M or more at 500 VDC Mega Insulation resistance Note) L is available for the D-P4DW type only.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Digital Gap Checker ( compatible)

Setting of OUT1 delay time at ON 0.01 s increment (0 to 60 s) 7 R/W Delay time OFF U16 100 Y 0 ~ 6000 Setting of OUT1 delay time at OFF 0.01 s increment (0 to 60 s) Selection of output mode when the OUT2 hardware output is set to "others" Output mode U8 2 Y 2: Err 3: OFF Other output 1 R/W (OUT2) 1470 0X05BE 0: Normal output 1: Reverse output 2 R/W Output type U8 0 Y -99No.PS-OMW0009-C 4

JXCx-OMX0009

mm/s LE-CP-#-#-# 100 500 100 500 1 1 200 1000 200 1000 2 2 To MOT 50 200 50 200 3 3 or PC To PWR USB cable (A-miniB type) Part No.

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

New

< Conduit terminal Conduit A A B B D C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2 40 47 77 73 84 132 53.5 64.5

OMR0031

time: tp = ta + tc + td [s] 0 0 250 500 750 1000 (Add settling time to the Positioning time to get the total Load Ma[g] positioning time).

JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.