VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Parallel Style Air Gripper Series MHZ

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification Standard specification With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q B 104

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Fieldbus System

2 B 2 B 2 B 2 B 2 55.5 69 3 1 54 12 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 22 17 19 34 69.5 1/2" 1(P) port 34.5 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Formula: L1 = 41n + 77 L2 = 41n + 175 * L2 dimension: Without I/O unit For additional I/O unit, add 47 mm. * n2: I/O unit stations Dimensions n: Stations (Maximum 12 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 118 159 200 241 282

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-K39 D-A3m D-A44 D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-F5NTL D-A5m D-A6m D-A59W D-P4DW Bore size A B A B A B A B A B A B A B A B A B 32 14 10.5 10 6.5 10.5 7 15.5 12 4 0 8 4.5 7.5 4 4 0 7 3.5 40 14 14 10 10 10.5 10.5 15.5 15.5 4 4 8 8 7.5 7.5 4 4 7 7 50 15.5 14.5 11.5 10.5 12 11 17 16 5.5 4.5 9.5 8.5 9 8 5.5 4.5 8.5 7.5 63 16.5 15.5 12.5 11.5 13 12 18 17 6.5 5.5 10.5 9.5 10 9 6.5 5.5

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

C 11 13 15 18 21 24 32 E 0.5 5.5 MA 2 x A screw depth B 5.4 M2 x 0.4 0.6 (B) 5.2 D0.8 C 1 M3 x 0.5 8 D (E) F-F 551 Parallel Style Air Gripper/3-Finger Type Series MHS3 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 How to Order Bore size 16 to 25 M9BW 20 MHS3 D 3 fingers Number of fingers 3 Number of auto switches Nil S 2 pcs. 1 pc.

MXQ

5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA 5H9 depth 5 +0.030 0 6 B A NN-M6 x 1 thread depth 12 24 9.5 9.5 5.1 5.1 10.5 10.5 B H A 21 9 21 9 (NN 1) x H G Section AA Section

Electric Actuators

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

Air Cylinder

150 0400 N 0200 R XC10 Stroke B Dual Operation Double Rod Auto Switch Mounting Bore Stroke A Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions PC P + A Stroke P + B Stroke Y Y 4-EE (NPTF) R K DD AA D Across Flats D Across Flats KK KK EA MM MM B B E/2 4-NT ND Deep SN + Stroke (A + B) Stroke B Stroke A G C A TN C G A E XT XT LD + Stroke (A + B) WF WF ZZ + Stroke (A + B) (in

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Modular F.R.L. Unit

B B B B B B O S N.C.: Gray N.O.: Black M5 x 0.8 S O 1/4 V Applicable models AC10, AC20 Barb fitting Applicable tubing T0604 Width across flats 17 10 One-touch fitting Bracket mounting size Accessory specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25