5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

ZP

(for Heavy-duty) Adapter assembly model Applicable pad model Series ZP Page ZP40HB ZP50HB ZP40H ZP50H ZPA-T1-B P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T2-B P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T3-B P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-T101 P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T201 P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T301 P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-X101-B P. 76 ZP63HB ZP80HB ZP63H

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

MXW

220.5 MX A 51 31 31 31 31 MTS B 104 124 149 174 199 MXW12 W 31 11 11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Rotary Table/Rack & Pinion Style Series MSQ

Nil S n Reed switch Auto switch A90 Solid state switch M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision style B Basic style 2 pcs. 1 pc. n pcs.

AC Servo Motor Driver

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 12 26 12.

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Environment

C A B C A B C A B C A B C A B C LEY40 1100 Work load [kg] 1 1.5 3 2.5 5 10 4.5 9 18 7 14 28 1 1.5 3 1.2 2.5 5 Lead 4: LEY40C 800 900 1000 Pushing force 85% 65% 85% 65% 95% 95% Lead 8: LEY40B Lead 16: LEY40A 10 20 30 40 50 60 70 80 90 0 100 200 300 400 500 600 700 Force [N] Non-rotating Accuracy of Rod Size Non-rotating accuracy q 16 1.1 25 0.8 32 0.7 40 + Max. 65% Set value of pushing force

Compact Cylinder

B dimension is 133 mm.

Sine Cylinder Series REC

MM NA 1.5 AL FZ FX Width across flats KA Effective thread length FL K A 2 x 7 F N N 40 Mounting hole ZZ + Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26

Sine Cylinder Series REC

MM NA 1.5 AL FZ FX Width across flats KA Effective thread length FL K A 2 x 7 F N N 40 Mounting hole ZZ + Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26

Sine Cylinder Series REC

MM NA 1.5 AL FZ FX Width across flats KA Effective thread length FL K A 2 x 7 F N N 40 Mounting hole ZZ + Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26

Air Slide Table Series MXW

100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5 99.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5

Precautions 1

Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm) A A B B A B A B A B B A B 20 25 32 40 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

XM, XY

(FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

SYJ300/500/700

Enclosure Based on IEC60529 Note 1) Based on dynamic performance test, JIS B 8375-1981.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Width across flats 14 1/8 Barb fitting Applicable tubing: T0604 Width across flats 17 1/4 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Optional specifications Bracket mount With auto drain B 104.9 156.8 186.9 188.9 A 40 53 70 75 P 1/8,

SYJ3000/5000/7000

(A) 4 (B) 2 (A) 4 (B) 2 Plug Plug Number of solenoids Single Double 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series SYJ5000) 1-5-74 75 Series SYJ3000/5000/7000 Specific Product Precautions 2 Be sure to read before handling.