C76

A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C

0.4

R R X X 40.7 25 9.3 B B B B B B B B P P 18.7 7.7 A A A A A A A A 18.1 P = 10.5 31.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 one-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 57.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

CNG

20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8

Electric Actuators

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

CATALOG VC10

215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Micro Mechanical Valve Series VM1000

VM120-01-30 (R, B, G, Y) A-X207 VM130-01-30 (R, B, G, Y) A-X207 Panel mounting hole 40 30.5 T.T. 28.6 0.8 to 7.5 3 1.5 1.5 Symbol 2 port (A) 2 R port (3 port only) (97.3) 43.7 12 10 1 (P) (68.7) 3 port (A) 2 5.5 25 10 12 14.5 14.5 1 (P) 3 (R) * 0.5 MPa supply 25.4 2 x 1/8 44 17 2 x 4.6 mounting hole F .O.F .* 27 N T.T. 6.7 mm VM220-02-30 (R, B, G, Y) A-X207 VM230-02-30 (R, B, G, Y) A-X207

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the

RHC

30 d d D D C C H H B B Material: Carbon steel Material: Carbon steel B Part no.

Mechanically Jointed Rodless Cylinders

MY3A40MY3B40 MY3A50MY3B50 MY3A63MY3B63 A B A B A B MY-S16 MY-S20 MY-S25 63.6 77.6 91 115 130 160 182 A B MY-S32 M8 x 1.25 45 64 11.7 6 11 6.6 A B MY-S40 M10 x 1.5 55 80 14.8 8.5 14 9 Note) A set of side supports consists of a left support and a right support.

48

to 200 30 to 300 30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType

Valve Single Unit

Gasket Series Round head combination screw SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated) Gasket SY3000-11-25 SX5000 SY5000-11-15 SX7000 SY7000-11-11 1-6-67 Base Mounted Series SX3000/5000/7000 SX5000: SS5X5-41PStations -01/C6/C8 1 8 Rc (Pitch) (Pitch) 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 (A, B port) SV SZ SY SYJ (Pitch) SX

Valve Single Unit

Gasket Series Round head combination screw SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated) Gasket SY3000-11-25 SX5000 SY5000-11-15 SX7000 SY7000-11-11 1-6-67 SX3000: SS5X3-41PStations -M5/C4/C6 M5 (Pitch) (Pitch) 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Manual override (Pitch) (Mounting hole) Triangle mark (P , EA, EB port) Manual

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

CQS

(mm) Stroke range (mm) A 29 29 35 39 OB H Q I RA K RB L T M N OA E D 6 8 10 12 C B 22 22 26 29 A 34 34 45 49 B 27 27 36 39 12 16 20 25 25 29 36 40 6 8 7 12 5 to 30 5 to 30 5 to 50 5 to 50 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 7.5 7.5 9 11 32 38 47 52 7 7 10 10 5 6 8 10 4 4 7 7 3.5 3.5 4.5 5 0.5 0.5 1 1 15.5 20 25.5 28 3.5 3.5 5.4 5.4 Note 1)

Cylinder with Lock Series CNG

20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16)

CNG

27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16)

EX120/121/122

11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

Compact Cylinder with Air Cushion Series RQ

32 40 50 63 80 100 A B A B A B A B Bore size CUJ 20 25 32 40 50 63 80 100 31.5 32.5 38.5 35 38 34 CU 35 36 42 38.5 41.5 37.5 13.5 5.5 14 6 11 3 19 11 41 42 48 44.5 47.5 43.5 18 8 18.5 8.5 15.5 5.5 23.5 13.5 CQS 47.5 48.5 54.5 51 54 50 18 13.5 18.5 14 15.5 11 23.5 19 57.5 58.5 64.5 61 64 60 20.5 16.5 21 17 18 14 26 22 CQ2 67.5 68.5 74.5 71 74 70 25.5 20 26 20.5 23 17.5 31 25.5 32 26 32.5 26.5