CJ2

Bore TH TT TU TC M3 X 0.5 6 6 8 11 CJ-CF006 8 CJ-CR006 5 6 +0.048 0 +0.048 0 CJ-T010B 10 M4 X 0.7 10 8 10 13 CJ-CF010 10 CJ-CR010 6 8 8 12 32 22 18 40 29 2 9 4.5 3.3 3.1 CJ-T016B 16 M5 X 0.8 16 10 12 15 CJ-CF016 12 CJ-CR016 7 10 10 16 38 28 20 48 35 14 2.3 5.5 5 6.4 Accessory: SCJ2 Bore size #11 1.3-12 Standard: Double Acting Double Rod Series CJ2W 6, 10, 16 How to Order CJ1 Bore size 6mm

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

MY1

side M4 x 0.7 depth 7 4-M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 depth of counter bore 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 10 Mechanically Jointed

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

CV/MVGQ

A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 8 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore

CV/MVGQ

Z 90 [91] ND S NB NA MM HX H F D C B A NN Bore size (mm) 10 8 0 0.022 10 0 0.022 46 9.5 12.5 M4 x 0.7 35 28 8 4 14 12 15 M8 x 1 91 [92] 16 47 9.5 12.5 M5 x 0.8 41 28 8 5 20 18 15 M10 x 1 10-15-7 8 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

CQS

6 8 7 12 M3 x 0.5 15.5 20 25.5 28 M4 x 0.7 32 38 47 52 6.5 6.5 9 9 3.5 3.5 5.4 5.4 6 8 10 12 5 6 8 10 7.5 7.5 9 11 30.5 40.5 22 27 35.5 45.5 27 27 34.5 37.5 32 32 39.5 42.5 8.5 8.5 9.5 10 13.5 13.5 14.5 15 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M4 x 0.7 M4 x 0.7 30.5 40.5 22 27 35.5 45.5 5, 10 M5 x 0.8 M6 x 1.0 34 44 24.5 29.5 44 54 M6 x 1.0 M6 x 1.0 37.5 47.5 27.5 32.5 47.5 57.5 Note

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001A2 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Replaceable Parts No. Ass'y No. Name Material Number VVQ1000-80A-1 VVQ1000-80A-2-2 VVQ1000-80A-3 VVQ1000-80A-2-4 Gasket O ring Clamp screw Clip 12 12 12 12 NBR NBR Carbon steel !0 !1 !2 !

Made to Order

24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100

0.4

) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

Speed Controller with Indicator

For Flow Control Equipment Precautions, refer to the Handling Precautions for SMC Products and Operation Manual on the SMC website, http://www.smcworld.com Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

5

0.7 6.5 7.5 7 4 0.5 20 5 to 50 29 24.5 39 34.5 7 10 36 5.5 M5 x 0.8 47 8 4.5 25.5 5.4 M6 x 1.0 9 8 10 7 1 25 5 to 50 32.5 27.5 42.5 37.5 12 12 40 5.5 M6 x 1.0 52 10 5 28 5.4 M6 x 1.0 9 9 10 7 1 Bore size (mm) Stroke range (mm) Note) Threaded through-hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 228 A Smooth Cylinder CQSY Series Dimensions: 12 to 25

V

52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8

C85

12 4 M5 x 0.8 M12 x 1.25 4.2 M4 x 0.7 15 7 6 9.5 5.5 6 19 10 12 8 10 28 16 5 4 16.7 8 12 12 4 M5 x 0.8 M12 x 1.25 4.2 M4 x 0.7 15 7 6 9.5 5.5 6 19 10.5 12 8 10 28 16 5 4 16.7 10 16 16 6 M5 x 0.8 M16 x 1.5 6.2 M6 x 1 18.3 10 9 10.5 5.5 8 24 14 5 17 12 14 38 22 6 6 19.7 12 16 16 6 M5 x 0.8 M16 x 1.5 6.2 M6 x 1 18.3 10 9 10.5 5.5 8 24 14 5 17 12 13 38 22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5

1

16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58

Table of Contents

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

CXWM/CXWL

x 0.8 thread depth 10 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) 2-M5 x 0.8 Cylinder port 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-M5 x 0.8 Thread depth 10 2-M8 x 1.0 RB0805 Shock absorber 2 x 2-5H7 depth 6 +0.012 0 8-26-18 17 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2-M5 x 0.8 thread depth 10 2 x 2-5H7 depth