100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

VQ7-6/7-8

8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.

Modular/F.R.L. Units Series AC

Section Attachment Model Type G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

39

12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

CC

E101. 10-17-16

CC

E101. 10-17-16

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Ionizer Nozzle type IZN10 Series IZS

0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3 0.6 0.25

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400