Process Valve Series VNA

Normally closed Normally open Double acting VNA01 VNA02 VNA03 Coil rated voltage (V) AC (50/60 Hz) 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15% to +10% of rated voltage 35C or less (When rated voltage is applied.) 5.6 VA (50 Hz), 5.0 VA (60 Hz) 12 VA (50 Hz), 10.5 VA (60 Hz) 3.4 VA (50 Hz), 2.3 VA (60 Hz) 7.5 VA (50 Hz), 6 VA (60 Hz) DC 12 (P1) 12 (P1) 10 (P2) Allowable

Mechanically Jointed Rodless Cylinder Series MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1B MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 MY1M 115 38 15 120 48 14 140 60 19 180 72 21 MY1C 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 MY1H 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1HT 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1W 150 50 50 130 60 16 The above values

Metal Seal/Rubber Seal Series VQ Body Ported

Function Coil voltage AC Symbol Specifications DC (1.0 W) (1) Light/Surge voltage suppressor Standard type Nil 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (2) (1.5 W) (0.5 W) H High pressure type Nil E Yes None (2) Low wattage type Y For power consumption of AC type, refer to page 2-4-10. Except double (latching).

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Compact Cylinder Series CQS

1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16

CA2

DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. 40 CA2-B04 +0.058 0 57 35 65 15 85 10 9 17 40 52 165 11 8 60 10 50 CA2-B05 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 63 +0.070 0 CA2-B06 67 40 80 25 105 12.5 11 22 50 66 196 13.5 10 85 16 80 +0.084 0 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 CA2-B10 93 60 16.5 100 35.5

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

MY1

Therefore, also check the allowable load for the selected conditions. 16 20 25 32 40 50 63 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 MY1C 30 14 10 49 21 6 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130 60 16 The above values are the maximum allowable values for moment and load.

Vacuum Ejector Series ZM

Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure ZX 60 60 60 Air consumption 50 50 50 ZR 40 40 40 ZM 30 30 30 Suction flow rate 20 20 20 ZMA Suction flow rate 10 10 10 ZQ Flow characteristics are expressed in ejector vacuum pressure and suction flow.

SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Refrigerated Thermo-chiller

200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Electric Actuator

20 30 40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work

Direct Operated

Pam3/sec or less 10 Note) to 60 10 Note) to 60 20 to 60 20 to 40 AC DC Note) The leakage amount (10 6 Pam 3/sec) for the V option are values when the differential pressure is 0.1 MPa.

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

MHZ2/MHZJ2

, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point

AC Servo Motor Driver (Pulse input type/Positioning type ）

ON EM1 (Forced stop 1) OFF Dynamic brake time constant V0 Machine speed te Time Fig. 10.3 Dynamic lock operation diagram V0 te + JM 1 + JL (10.2) Lmax = 60 10 5 10.