IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

CV/MVGQ

D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4. One-touch fitting cannot be replaced. One-touch fitting is press-fit into the cover, thus cannot be replaced.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

0.4

2 18.5 T 12 12 kit EXH outlet L Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n kit 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported S R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A kit 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C kit P=17.5 63.3 44.5 7.5 One-touch fitting

JXCx-OMU0004

5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700 40 700 8 45 800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70

5 Port Air Operated Valve Series SYA3000/5000/7000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

VFR

Symbol 02 2 stations A, B P , EA, EB Symbol 04 06 Passage Porting specifications (A, B) EA, EB P 10 10 stations 1 2 Symbol 3 4 3 4 1 Side 2 Bottom M Mixed Common Common For bottom ported: 1/2 only.

Rotary Actuator/Vane Type

Set range of Block C = 135 (195) Single flat Point zero CRB2 CRB2 Set range of Block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w CRB1 End e Set range of Block D = 90 MSU End w End q Single flat CRJ End q (45) A port B port A port B port CRA1 B port A port B port A port Clockwise

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

VM

VH Twist selector (3 position) VM230-02-35R/B/G/Y VM250-02-35R/B/G/Y Panel mounting hole VHS JIS Symbol 2 port EXH port 5 port EXH port (5 port only) (5 port only) 0.5 MPa supply 40 N F.O.F. 45 T.T.

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

HRX-OM-R026

Ambient temperature: 43 oC 6 Ambient temperature: 45 oC 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [] Fig. 9-5 Cooling capacity(HRSH090-A-20-) 9.4.2 HRSH090-A-4012 10 Ambient temperature: 32 oC Cooling capacity [kW] 8 6 Ambient temperature: 43 oC 4 Ambient temperature: 45 oC 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [] Fig. 9-6 Cooling capacity(HRSH090-A-40-

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Sine Rodless Cylinder Series REA/REB

REAL40 REAL25 REAL32 Model 10 (2.48 1.3 x 10-3 x ST) 30 10 (1.98 1.3 x 10-3 x ST) 10 (2.26 1.3 x 10-3 x ST) = 50 20 2.

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6

VQZ1000/2000/3000

8 One-touch fitting for 10 M5 thread Rc 1/4 C3 C4 C6 C8 C10 M5 02 Type of actuation 2 position single (B) 2 (A) 4 1 5 (R1) 1 (P) 3 (R2) 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Note) For inch size and One-touch fittings, refer to page 2-7-27. 2 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) Metal seal Rubber seal Manual override 3 position closed center (A) 4 (B) 2 Nil: Non-locking push type (