Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Speed Controller: Standard Type Series AS In-line Type 1

Description Material q w e r No. Description Material Note o !0 !1 !2 NBR Brass Brass Steel O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Brass Stainless steel Needle guide Electroless nickel plated Electroless nickel plated Black oxidized coated Handle E type snap ring Electroless nickel plated Replacement Parts No.

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A031 (70mm Offset Machined ref NAAMS ACA031M), L Arm Mtg Position: D (Mounting Position D), L Arm Style: A031 (70mm Offset Machined ref NAAMS ACA031M)

Size: 8, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: K (LES8: 4mm; LES16: 5mm; LES25: 8mm), Stroke: 30mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 8 (8m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O

Size: 16, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: K (LES8: 4mm; LES16: 5mm; LES25: 8mm), Stroke: 75mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 8 (8m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 02, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 03, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 02, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 02, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 08, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 12, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 12, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 1 (VFA1000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust)