CLQ

X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2 95 91.5 113 16.2 9 80 53.5 13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 6 137 136 162 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92

CNS

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z There are other applicable auto switches than listed above. For details, refer to page 9-8-22.

HRX-OM-T002

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. #40 7 Filter Rc1/2 20m 8 Valve Rc3/8 Y-strainer Rc3/8 Install either the strainer or filter.

AC Servo Motor Driver (Network card type ）

or less above sea level(note7) Vibration resistance 5.9 m/s2, at 10 Hz to 55 Hz (directions of X, Y and Z axes) Mass [kg] 1.0 1.4 1 6 1.

Precautions 1

020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron R1 R1 Y (Max.)

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55

HRX-OM-Q026

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m 7 Pressure gauge 0 to 1.0MPa Y-strainer Rc1 #40 HRS-S0212 Install either the strainer or filter.

Electric Slide Tables

DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes Output 200

Title not found

Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Compact Cylinder

wire and case) 10 to 60C Ambient temperature Enclosure IEC60529 standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) 1 m (M): Available D-M9(V) only The D-M9M and M9VM (lead wire length: 1 m) will be available with products delivered from August 2008 onwards.

Compact Cylinder with Lock Series CLQ

X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2 95 91.5 113 16.2 9 80 53.5 13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 137 136 162 6 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

MNB

P-76 (M)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed above, refer to page 23 for details. For details about auto switches with pre-wired connector, refer to the Best Pneumatics No. 3. For the D-P3DWA, refer to the WEB catalog.