Series KC Self-seal Fittings

Rc(PT) 1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT) 3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Applicable tube O.D. Part No. Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60 7 70 8 80 9 90 Symbol Valve type Symbol Body material Size 30 40, 50, 60 70, 80, 90 C Brass V V S Stainless steel V V B Bronze V A Aluminum V 2(OUT) 1 N.C. 1(IN) r Seal material t Port size i Electrical entry Symbol Seal material N NBR F FKM E*1 EPDM Symbol Connection Port size Size 30 40 50 60 70 80 90 02 Symbol Electrical entry CE/UKCAcompliant UL Standards 1/4 V 03 3/8 V V 04

Modular Type Lubricators Series AL

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.

With Factory Installed

O~ 0.2 0.3 04 05 0.6 O~ 08 09 00 1000 2000 Auto drain Flow rate /min (ANR) Inlet pressure MPa (Float type normally open) AW4001-04 AW4001 -04 OOrain line should be Bmm or more and should be less than Sm. Be sure not to have any upward turns in the drain line which would prevent drainage. -0.25 H---''t' .:c ' +-+-t---+--r--.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

VP717 AC40-A Y400-A Y400T-A E400-04-A AN40-04 AN402-04 * Refer to page 3 for details of the spacer. 1 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Specifications Fluid Air Type of actuation N.C.

NCQ8

"), 250 (2-1/2") RCSK-015 RCSK-02 RCSK-03 RCSK-04 RCSK-05 RCDK-015 RCDK-02 RCDK-03 RCDK-04 RCDK-05 Rod Clevis Pin Applicable bore size Including Kit no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

00 02 04 No 2 port valves used 2 pcs.

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

5 Port Air Operated Valve Series VFA3000 1

2 position single: VFA5144SA VA SA (Mounting hole) (Pilot port) (Breathing port) VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR VH VHS (Piping port) ( ): Value for Rc 1/2 02 03 04 2 position double: VFA5244(Mounting hole) (Breathing port) (Pilot port) (

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Table of Contents

Blanking plug KQ2P23 04 06 Dimensions It is inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

VQZ1000/2000/3000

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18