Slit Valve XGT Series

Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available RODLESS CYLINDER. CY1F CYLINDER. 6.16900 lb. 585.

Low Profile Slide Table Series MXF

Slide Table Series MXF Dimensions: MXF8 Stroke adjuster at extension end Stroke adjuster at retraction end MXH Width across hexagon socket hole 2 Width across flats 6 MXU N 2 ( 1) x F Blanking plug (M-3P 2 points) 19 Possible to use as operating port 2 x M3 x 0.5 MXS 3H9 +0.025 0 depth 3 Note) F (Equal pitch) N x M3 x 0.5 thread depth 6.5 (Insert) 6 A 4 4.7 MXQ 48 6 10.5 35 MXF 14 21 31

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Vacuum Unit Series ZK2

With exhaust interference prevention valve Note 23, 25) W Exhaust interference prevention valve Note) Refer to page 31 when mounting single unit to DIN rail. 2

Model Type: 31 (Disposable, Long Size), Connection, IN OUT: 5 (URJ)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: A (AW+AL), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)