3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 121 lb

internally (except size 10) to further improve reliability.Rotary actuator, free-mounting type, CRBU2, Sizes: 10, 15, 20, 30, 40, Possible direct mounting from 3 directions, Three styles of units available: switch, angle adjusting, switch and angle adjusting, Available in single or double vane, Single vane type can rotate up to 270°, Actuator, Free Mount Rotary, ROTARY ACTUATOR, 517, 121

High Vacuum L Type Valve

equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121

High Vacuum L Type Valve

Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0003 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121

01-mxw-e

Applied part GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 121

C76

0.047 12 0.032 0.059 32 40 34.5 46.8 9 12 7 10 42.5 58.2 Rod foot (Flange), Rod and head foot Head trunnion Item XC LS XL 1 to 50 51 to 100 146 179 101 to 150 171 204 151 to 200 196 229 201 to 250 254 1 to 50 145 179 51 to 100 170 204 101 to 150 195 229 151 to 200 220 254 201 to 250 279 1 to 50 122 147 51 to 100 147 172 101 to 150 172 197 151 to 200 197 222 201 to 250 247 Stroke Bore 32 121

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

ISO Standard Hydraulic Cylinder

D G MA A MM 40 25 to 800 52 90 M6 x 1 25.5 51.5 7.5 M16 x 1.5 11 16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800 96 147 47.5 95.5 10.5 M33 x 2 14 60 42 17 18 121

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

13 16 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 ZZ H H2 H1 B2 B1 80 80 82 108 E 8 10 12 14 KA FL 10.5 10.5 10.5 13.5 GA 8 8 8 11 GB 6 8 10 12 WA 31 31 31 36 WB 13 13 13 16 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 Bore size 26 26 26 31 41 45 45 50 8 8 8 10 121

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

SMC Pneumatic Clean Series

port M5 x 0.8 WA GA GC WC GB Cushion valve (Width across flats 1.5) WB 2-P Width across flats B2 Width across flats B1 H1 H2 (Rc, NPT, G) NN I Eh8 D MM AL A K H F 1.5 N1 ZZ + Stroke S + Stroke N2 NA (mm) ZZ S P N2 I E D A 41 32 32 26 B2 22 17 17 13 B1 16 13 13 13 WC 6 6 6 6 13 F Bore size H2 H H1 AL K MM NA NN GC N1 WA WB 31 26 26 26 GA 11 8 8 8 GB 0 50 45 45 41 6 6 5 8 8 8 158 127 125 121

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121

Rotary Actuator/Vane Style Series CRB2

Mass (g) DVane type Single vane Double vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Model 90 180 180 90 100 90 270 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 400 446 387 365 25.7 49 376 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

CV/MVGQ

side Extended side DSymbol Specifications 10 -XA Change of rod end shape 6.9 3.5 -X 16 14.2 6.9 20Data 10-15-11 Series CVJ3 Weight Minimum Stroke for Auto Switch Mounting (mm) Auto switch mounting No. of auto switches mounted Spring Return Auto switch model (g) 2 (Different sides) 2 (Same side) 1 Bore size (mm) 10 16 D-C7/C80 15 50 10 Band mounting style Rail mounting style 15 stroke 80 121

CXS

15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121

Slider Type/Ball Bushing Bearing

PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95 90 1.0 30 12.5 22.5 92 112 8 8.5 27 17 15 Rc 1/8 RB1006 50 M6 x 1.0 90 120 105 M10 x 1.0 40 16.5 25.5 117 130 10 10.5 29 20 28 Rc 1/8 RB1411 60 M6 x 1.0 0.5 100 130 105 1.0 M14 x 1.5 50 16.5 25.5 127 130 10 12.5 49 40 22 DRc 1/8 70 M8 x 1.25 0.5 120 160 121

MY1

head taper plug) Cushion needle A GB N Z + Stroke A 80 100 110 140 170 B 6 7.5 9 11 14 C 3.5 4.5 5.5 6.6 8.5 G 9 12.5 16 19 23 GB 17 20.5 24.5 30 36.5 H 40 46 54 68 84 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 K 10 12 9.5 16 15 L 80 100 114 140 170 LD 3.5 4.5 5.6 6.8 8.6 HG 13.5 17.5 21 26 33.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 (LL) 40 50 53 70 85 LW 60 78 90 110 121

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

DC (+) Brown Weight OUT (Normal output) Black (g) Main circuit of switch D-F59F Auto switch model Diagnosis OUT (Diagnostic output) Orange 0.5 22 Lead wire length (m) 3 77 DC () Blue 5 121 Diagnostic Output Operation The diagnostic signal is output within unsteady detecting area (where indicator light is Red), and the diagnostic output becomes OFF when the detecting position remains within