Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Specications Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Model HRS100-Al-20-l HRS150-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.3 1.65 Control method PID control Ambient temperature Note 1) C 5 to 45 Circulating uid Note 2) Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Thermo-chiller

Symbol Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) Specications There are different values from standard specications. Refer to page 15 for details.

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 2 [Metal (Size 20 to 60)], Option: J [Drain Guide (Size 20 to 60)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: B (Bracket, Not Attached), Bowl Type: 2 [Metal (Size 20 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 6 [Nylon (Size 20 to 60)], Option: CJ [Bowl Guard+Drain Guide (Size 20)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: B (Bracket, Not Attached), Bowl Type: 6 [Nylon (Size 20 to 60)], Option: CJZ [CJ+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20)]

IDX-OM-Y002

Discharge the cleaning fluid and rinse the cooling tower with water for 20 minutes or longer to get rid of the cleaning agent. Hose Circulation pump Water amount 20 to 30 L/min. Pressure 0.1 to 0.3MPa Tank (Barrel) c Procedure when the cooling tower is used. 1. Inject the detergent into the cooling tower and clean the tower for specified period of time. 2.

VF1000-OMP0001

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

SI unit for DeviceNet ®

No.EX-OMN0013-I PRODUCT NAME SI unit for DeviceNet MODEL / Series / Product Number EX260-SDN# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Installation and Wiring 10 Installation 10 Wiring 11 LED Indication and Settings 15 DeviceNet Objects 20 Troubleshooting and Maintenance 28 Specification 33 Specifications 33 Dimensions 35 Accessories

HRX-OM-W004

MT.01 MT.01MT.05 MANT screen CODE No.20 Contact output signal 3 function ALM *1 D.OUT3 Setting function of contact output signal 3. screen SEL Contact output signal 3 operation No.21 B A/B D.OUT3 Setting output operation of contact output signal 3. screen TYPE D.OUT3 No.22 Contact output signal 3 alarm AL.01 AL.01AL.32 Setting selected alarm of contact output signal 3.

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

Steam Valve

Symbol Graph (1) VND 02 D Pilot Pressure (N.O. type) Valve type Valve size N.C. N.O.

Air Suction Filter

Specifications Fluid Note 1) Air, Nitrogen 100 to 0 kPa Max. 0.5 MPa (Unable to hold when pressurized) 5 to 60C 30 m (Filtration efficiency 95%) 20 kPa Operating pressure range Vacuum release pressure Operating and ambient temperature range Filtration accuracy Element replacement differential pressure Max. 10 station manifold is possible.

Special Application: Clean Series, Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 2 [Metal (Size 20 to 60)], Option: J [Drain Guide (Size 20 to 60)]

Special Application: Clean Series, Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 6 [Nylon (Size 20 to 60)], Option: CJ [Bowl Guard+Drain Guide (Size 20)]

Special Application: Clean Series, Body Size: 20, Thread: NPT, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: Bracket, Not Attached, Bowl Type: 2 [Metal (Size 20 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]