High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

AHC System Series MA

MRHQ View D Mass: 130 g Mass: 210 g MA 6 x M3 x 0.5 thread depth 7 (A, B, C common view) DNote) Refer to Series MHR2 (page 492) for the detailed specifications of air grippers. 753 Series MA3 16/20 Air Gripper: Standard Type MHZ2-16D-A310 PCD16 With robot adapter Finger opening port With O-ring 69 MA31 2-YM530 29 Hexagon socket head cap screw M3 x 14 (3 included) 10.6 15 58 82 98.5 6.5 43

IN20267

Stoppage by clamping or external stopper) This may lead to premature failure of the product. 43 - IN20267 Plate load should be mounted so that the center of the gravity of the load will be on the piston rod shaft. Failure or malfunction may result. Do not touch the sensor rod. Do not drop, hit or apply shock to the product.

1

0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 M22 x 1.5 32 12 15.5 M5 x 0.8 40 23.5 20.5 22 14 27 0 0.039 12 9.5 39 8 Width across flats 12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43

Air Cylinder

For example, the bore size to move a workpiece with a weight of 37 kg requires a bore size of 43 or more.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 KPP-04 6 32 13.8 0.4 D d 6 KPP-06 8 35 15.7 0.7 8 KPP-08 10 39 17.3 1.1 Applicable fitting size d 10 KPP-10 12 43 19.2 1.7 12 KPP-12 14 45.5 20.7 2.5 The plug is commom for KPQ, KPG and KP series. 360 KP/KPQ/KPG Series Specific Product Precautions 1 Be sure to read this before handling the products.

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

Industrial Filters

52 27 43 52 FGF Note 1) Cannot be used with gases.

Thermo-chiller/Rack Mount Type

Model Weight [kg]*1 Dimensions [mm] HRR010-A 43 Height 485 x Width 610 x Depth 820 HRR010-W 41 Selection HRR012-A HRR018-A 54 Warning Height 575 x Width 610 x Depth 820 HRR012-W HRR018-W 55 1. Model selection When selecting a thermo-chiller model, the amount of heat generation from the users equipment must be known.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Common connector assembly part numbers Positive common specifications For single solenoid SX100-42-4S Negative common specifications For single solenoid SX100-43-4S Common wire COM A B COM A B COM A B COM A B COM A B COM A B COM A B COM A B For double solenoid, 3 position, 4 position types SX100-42-4D For double solenoid, 3 position, 4 position types SX100-43-4D Socket Insert socket into

Compressed Air Preparation Filter

E G Maintenance space *1 Q2 (Sizes 20, 40) Q1 (Size 30) Standard specifications Optional specifications Bracket mount P A C E F G J M Q1 Q2 R S U V1 V2 Size 20 2 1/8, 1/4 83.2 26.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 Size 30 2 1/4, 3/8 110.2 30.5 30 55.1 35 26.5 41 35 7 14 6 42.5 42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43

Manifold Regulator ARM1000/2000 Series

methods ARX Regulating pressure range AMR Ambient and fluid temperature Fluid Cracking pressure (Valve) Construction ARM ARM ARP Port Size/Weight IR-A Model Piping Port size Weight (g) IN side OUT side Total weight (n: stations) Regulator (Except manifold) Small size pressure gauge 15 Backflow function available on the standard model Space-saving IR (80 x n) + 23 (79 x n) + 25 (188 x n) + 43

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Refer to front matter 43 for Safety Instructions and pages 365 to 369 for Precautions on every series. Mounting Caution Design Warning 1. To avoid reversed connections of the air inlet/outlet, make connections after confirming the IN/OUT mark or arrows that indicate the direction of air flow. Reversed connections can cause malfunction. 2.

Speed Controller with

D5 Applicable series L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS1002F AS2002F AS2052F AS3002F AS4002F AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 9.9 13.4 3.4 3.5 3.5 11 27.5 19.5 1 AS1002F AS2002F AS2052F AS3002F AS4002F 3.4 14.8 18.3 3.4 4.9 7.3 12 45 11.2 1.6 15.6 19.6 12.6 29 21 1.2 4.5 4.4 4.4 19.6 24.6 17 38 28 4.5 24.8 29.8 22 43 33 4.5 6.5 9.5 15.5 1.4 25.7 30.7 28 49 39 Brackets

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43

SMC Pneumatic Clean Series

31.5 35.5 43 Note) The above values should be used as a guide for detection at stroke end.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(mm) B1 H LH LX 22 22 GA GB GC KA LD 138 109 107 103 1/8 AL MM X Y B 52.3 42.3 36.3 30.3 ND 20-0.033 0 7 5.5 5.5 5 K Bore size ZZ S P N L D A H1 I 17 17 13 34 31 31 27 6 6 5 18 15 25 21 8 8 6 6 8 6 5.5, 9.5 counterbore depth 6.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 49 43 43 39 15 12 12 12 104 78 76 76 42.5 34.5 30 24 14 12 10 8 58.5 47 39 33.5 21 19.5 19.5 15.5 40 32 25 20 24 22 22 18

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15