XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

VCA

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF. Warning 1. Cannot be used as an emergency shutoff valve, etc.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

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a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Applied voltage When connecting fittings to valves, tighten as indicated below. 1) M3, M5 types 1. When using SMC fitting, follow the guidelines below. After tightening by hand, tighten an additional 1/4 (M3), 1/6 (M5) turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

JXCx-OMT0002

Note 2) For LIN-A and LIN-I, Axis 1 to Axis 3 are based on interpolation. Do not perform a setting for Axis 4. -54No. JXC-OMT0002-C (4) CIR-R / CIR-L Area 1 Step No.

Large Size Vacuum Module: Series ZR

pressure supply port (PS) Filter block Spacer A Valve unit 84 2 x 4.2 (Mounting hole) Rc 1/8 PV port Air pressure supply port(PV) A 2 2 1.2 1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR1 1-K1M-D10 13 15 7.2 1 For port exhaust 9 (Needle fully open) Exhaust (EXH.) port Rc 1/8 A A B B A A B B S S A A B B 73 Digital pressure

Air Cylinder Series CA2

Auto switch capable CA2 Construction CS1 CS2 q w e r t y u i o !0 !5 !6 !7 !8 !9 @0 @1 @2 @3 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Direct Operated

Selection Piping Caution Caution 1. Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off. 1.

RB/RBL/RBQ

Ambient temperature Friction coefficient Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh R m RHC m 2 1 2 m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C

RB/RBL/RBQ

t = 25C m 2 1 2 m 2 1 2 R Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

Air Cylinder NCM Series Stainless Steel Cylinders

Cushion standard on 76 and l/a bore onlv {must include C if desired on these bore sizes). ultENstoNs r":-t _1-1,--lY+/ 075 {!a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) The chart above shows the leakage test results based on a test conducted using this cylinder construction. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a Note 2) To allow fine stroke adjustments, O-ring seals are installed to separate vacuum and atmosphere.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

o n ti ti e g a n o a r ti a a e t n 1 t t o o g o 0 1 r e Key r r 0 9 y 2 y y 0 e 8 e e +4 0 K 0 K K +4 0 +4 0 +4 0 0 Key Key 0 (40) 1 Key e g n a r n o ti a t o r y (85) e (40) K (40) A port B port A port B port A port B port A port B port 4 Series CRB1 With Auto Switches Applicable auto switches Auto switch model Electrical entry Indicator light (lights when ON) Yes D-R73 Grommet