Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Series H, DL, L, LL Self-align Fittings

L2 L1 Thread R(PT) Part No.

Compact Cylinder with Air Cushion Series RQ

A A' A' R H R H e When air is supplied for piston extension, the check seal opens and the piston starts with no delay.

KF

Swivel Extended Elbow: KFW H1 (width across flats) H2 (width across flats) H3 (width across flats) H4 (width across flats) Applicable tubing (mm) Connection thread R Effective area (mm 2) Weight (g) L2 L3 L4 A Model L1 M d I.D.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

R.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Basic Type/Direct Mount Type

7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Unit Manifold Valve

In case of 4 stations 1(P) 3(R) 2(A) 2(A) No.4 No.3 2(A) 2(A) Solenoid Specifications No.2 No.1 Coil rated voltage 12, 24 VDC In case of 8 stations 12 VDC 24 VDC Allowable voltage fluctuation Note) 1(P) 3(R) Standard 4% to +10% 7% to +10% Power-saving type 6% to +10% 5% to +10% 2(A) 2(A) Standard: 0.55 Power consumption (W) No.8 No.7 With power-saving circuit (Continuous duty type): 0.23

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.

Low Profile 2/3-Port Solenoid Valve

Output circuit Surge voltage 24 V 0 V sol. 1: Holding 60 V R Surge voltage 24 V 0 V Internal circuit sol. 2: Non-holding 60 V R Surge voltage 24 V 0 V Large capacity load: Holding 60 V R Relay Power supply circuit breaker 24 VDC Figure 1. Surge intrusion circuit example (NPN outlet example) Piping Output circuit Caution Surge voltage 24 V 0 V 1.

SFOD-OMT0009CN

/ CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 () () 1) CIR-R CIR-L 1 2 34 (5) SYN-I Area 1 Step No.

Ｖ cylinder

Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 16 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig 6, ) Pay attention to the mounting direction of the seal. Apply grease all over the seal and inner surface of the bushing as shown in Fig. 7.

AMX-OM-L025_e

N ever f ai l t o use dry ai r. D eodori zat i on m ay det eri orat e i f w at er drop i s cont ai ned i n com pressed ai r. N o back f l ow Pl ace w here ai r f l ow s backw ards I N El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L M N o Z SYM BO L o P Q Z I nst al l vert i cal l y.

SFOD-OMT0010

) Note 1) For CIR-R and CIR-L, Axis 1 and 2 are based on interpolation.

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.