,,: ,.

D0I/$[E lln fiee|ficrilotr ltr tdts ltU ||UT & $lt tmwoil fi[hry 1200 psi (8.3 Mpa) Proof Pressur 450 psi (3.1 Mpa) -40.F 200'F G40'C 93'C) 7 Ncm3/min, or less ANSUASME 1.20, 1-1983 (NPT thread) Applicable Tubing hftEllf,] elcmenfi mobrlNl SIVIC CorDoration of America has a policy of continual product dsvlopment and resrws rhe dgm to change diflEnsions or specilications without prior notilication

Process Pump

0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

25

pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

3

rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200

Rotary Table/

The range of angles within which the shock absorber operates is between the rotation end and the values shown below. 10 20 30 50 Size 7.1 6.9 6.2 9.6 For low energy 8.6 8.0 7.3 10.5 For high energy Weights (g) 10 630 20 30 50 Size 90 specification 2480 1520 1200 Basic type 180 specification 2370 1450 1140 600 90 specification 2810 1750 1390 700 High precision type 180 specification 2690 1680

MXQ

Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200

Air Slide Table

H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke: 20 to 40 mm Cross-sectional view A-A Dimensions/Weights Stroke A Stroke B Model Dimension [mm] Weight [g] Additional weight of adjuster option Extension stroke end Retraction stroke end F N G H HA NN GB HB I J M Z ZZ 5 20 MXQ20A-5-15Zm-X2192 40 4 46 46 3 60 70 60 34 123.5 137 156 1200

Booster Regulator/Air Tank

Characteristics Flow Rate Characteristics 2 1.0 1.0 P1 = 1.0 MPa 0.8 0.8 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 1.5 P1 = 0.5 MPa P1 = 0.75 MPa 0.6 0.6 1 P1 = 0.5 MPa P1 = 0.5 MPa P1 = 0.4 MPa 0.4 0.4 P1 = 0.4 MPa P1 = 0.3 MPa P1 = P2 P1 = 0.4 MPa P1 = 0.3 MPa 0.5 P1 = 0.3 MPa 0.2 0.2 0 100 200 300 400 Outlet air flow rate (L/min (ANR)) 0 200 400 600 800 1000 1200

Air Checker:

.: 0.96 mm High visibility A large LED display for an easily visible switch Wetted parts material Standards Pressured sensor part: Silicon, Body part: PBT, O-ring: HNBR CE (Option), RoHS Note) For wiring, refer to the Operation Manual on our website, http://www.smcworld.com Series PS1000/1100/1200 CAT.NAS100-23B RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications

1.1

Process mode: 1.45 kW Idle mode Note): 1.45 kW Inverter control Refrigerator ON/OFF control (HRGC002-A) -74% 0.38 kW 1.11 kW Note) Operating conditions: Process mode: Circulating fluid temperature 20C, Heat load 2 kW Idle mode: Circulating fluid temperature 20C, Heat load 0 kW Reduced running cost Contribution to the environmental preservation Refrigerant: Refrigerant weight 1200 g Conventional

Booster Regulator/Air Tank

Flow-rate Characteristics Flow-rate Characteristics Flow-rate Characteristics 2 1.0 1.0 P1 = 1.0 MPa 0.8 0.8 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 1.5 P1 = 0.5 MPa P1 = 0.75 MPa 0.6 0.6 1 P1 = 0.5 MPa P1 = 0.5 MPa P1 = 0.4 MPa 0.4 0.4 P1 = 0.4 MPa P1 = 0.3 MPa P1 = P2 P1 = 0.4 MPa P1 = 0.3 MPa 0.5 P1 = 0.3 MPa 0.2 0.2 0 100 200 300 400 0 200 400 600 800 1000 1200

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) D16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 -X 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Symbol Specifications 6, 10 15, 20, 25, 32, 40 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -X1468 Hydro specifications 1200 Axial ports 100 40 40 1100 High speed specifications 90 1000 900 Bore size 10 Bore size 10 Helical insert thread specifications Theoretical thrust (N) Theoretical thrust (N) 80 Bore size Bore size Added mounting tap positions for slider 70 800 700 32 32 Non-lubricated

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 1200

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Bag Filter FGF Series

Specifications FGF1B-20 FGF3A-40 Note 7) FGF3B-40 Note 7) FGF5A-60 Note 7) FGF5B-60 Note 7) Model FGF1A-20 Operating pressure Operating temperature Maximum flow rate Note 1) Max. 0.5 MPa Max. 80C (For with pressure gauge: 60C or less) Common Approx. 400 L/min Approx. 1200 L/min Approx. 2000 L/min Applicable fluid Note 2) Water-soluble coolant, Weak alkali-based cleaning fluid, Industrial