ITV

32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket (Option) 19 Port Location No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

JXCx-OMX0009

Safety Instructions . 5 2.

Modular F.R.L. Units

Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50-B and AR60-B *3 Mounting thread for pressure gauge: 1/8, Pressure gauge

Compact Cylinder Series NCQ8

1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #6-32UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4 4-1/2 5 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-

Rotary Actuator/Vane Type

L1-(3 x P) X = L1 = X = Q2 = M CRJ CRA1 [mm] Size CRB2, CRBU2 Y L2 max Q2 10 5.5 to 8 Y-1 3 15 7.5 to 9 Y-1.5 3, 4 20 9 to 10 Y-1.5 3, 4, 5 30 11 to 13 Y-2 3, 4, 5, 6 40 14 to 15 Y-4.5 3, 4, 5, 6, 8 [mm] CRQ2 Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 7.5 to 14 X-3 3 5.5 to 14 X-1 3 15 10 to 18 X-4 3, 4 7.5 to 18 X-1.5 3 20 12 to 20 X-4.5 3, 4, 5 9 to 20 X-1.5 3, 4 30 14 to 22 X-5 3, 4, 5

HRX-OM-Y120

. 5-4 5.7 Setting method . 5-5 5.7.1 IP Address Setting . 5-6 5.7.2 Setting of subnet mask and default gateway. 5-7 5.8 Communication sequence. 5-8 5.9 Message configuration . 5-8 5.10 Function codes . 5-9 5.11 Explanation of function codes . 5-10 5.12 Register Map . 5-11 5.12.1 Circulating fluid discharge temperature . 5-13 5.12.2 Circulating fluid electrical conductivity . 5-13 5.12.3

Aluminum High Vacuum Angle Valve

Symbol Nil None A B C Changed part XVD Without indicator With indicator Without indicator With indicator XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H 5 to 60C 8-1 8-2 XGT 8-1 5 to 150C 8-2 Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 CYV Temperature Seal material: Same as the seal materials of How to Order Valve Same as How to Order Specifications Valve type Shaft seal

Parallel Style Air Gripper Series MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch model L L L Finger position D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL Air gripper model 11 13 3.5 6.5 4 11 13 5 7 5 3 8 6 5 3.5 5 3.5 No setting 9 11 1.5 4.5 2 9 11 3 5 3 1 6 4 3 1.5 3 1.5 13 15 5.5 8.5 3 6 4 13 15

Environment

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

HRX-OM-R039

. 5-8 5.3.1 Alarm display menu . 5-8 5.3.2 Content of display of alarm display menu . 5-8 5.4 Inspection monitor menu . 5-9 5.4.1 Inspection monitor menu . 5-9 5.4.2 Checking of the Inspection monitor menu . 5-9 5.5 Alarm buzzer sound setting . 5-12 5.5.1 Alarm buzzer sound setting . 5-12 5.5.2 Alarm buzzer sound setting and checking . 5-12 5.6 Alarm customize function . 5-13 5.6.1 Alarm

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Fieldbus system Analog unit

-10 to 10 V -5 to 5 V -20 to 20 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement

10

2 3 5 4 7 4 7 5 8 5 8 240 240 240 240 240 240 370 370 370 370 500 500 500 500 6 VX240 1 8 145 (1.0) 8 VX250 2 10 10 VX260 3 12 Note) Weight of grommet type.

Plug-in Unit

input no. 1, 3, 5, 7.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

LJ1H

5 !5 i q A A !2 @1 @0 !4 u Section AA Parts list Material Note No. Description No.

A-HEC-OM-J004

and Display Panel .5-4 5.4.2 Setting of Data .5-5 5.4.3 Selection of Operation Mode .5-6 5.4.4 Details of Operation Mode .5-7 5.4.5 Selection of Setting Mode .5-9 5.4.6 Selection of Initial Setting Mode . 5-10 5.4.7 Details of Initial Setting Mode . 5-10 5.4.8 Selection of Control Setting Mode . 5-12 5.4.9 Details of Control Setting Mode . 5-12 5.4.10 Selection of EV Output Setting Mode

Mechanically Jointed Rodless Cylinders

5 !6 !7 !8 q y !0 !4 !9 r !1 @0 @2 @5 o @4 @3 !