MQQ

on page 10-5-20.

Single Axis Electric Actuator Series LJ1H

Page 209 LXF/5 phase stepper motor . 210 LXP/2 phase stepper motor . 218 LXP/5 phase stepper motor . 234 LXS/2 phase stepper motor . 250 LXS/5 phase stepper motor . 266 Stepper Motor Driver/Positioning Driver Series LC6D/LC6C Dedicated Teaching Box . Page 313 Options . 315 Stepper Motor Driver/Positioning Driver LC6D/LC6C .

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

Basic Type/Direct Mount Type

Select the bore size from Lo and Fn, based on data A . 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Load Workpiece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B10 CY3B40 500 50 300 Fn 200 40 30 20 Discrepancy absorption mechanism 100 Lo 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 Selection example

SMC Pneumatic Clean Series

D-C73 D-H7B D-H7A1 Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less Refer to page 182 for a list of applicable auto switches.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

5 !6 !7 !8 !

C95

5 !

AC Servo Motor Driver (CC-Link Type)

Parameter list (Driver side) . 17 5.

SMC VVQZ2000-10A-5 blank plate assy, vqz2000, VQZ2000 VALVE, SOL 4/5-PORT*** $3.93 + Add to Quote Add To Cart Add to Cart SMC VVQZ2000-20A-5 interface flow control, VQZ2000 VALVE, SOL 4/5-PORT***

SMC VVQZ2000-10A-5 blank plate assy, vqz2000, VQZ2000 VALVE, SOL 4/5-PORT*** $3.93 + Add to Quote Add To Cart Add to Cart SMC VVQZ2000-20A-5 interface flow control, VQZ2000 VALVE, SOL 4/5-PORT***

SMC VVQZ2000-10A-5 blank plate assy, vqz2000, VQZ2000 VALVE, SOL 4/5-PORT*** $3.93 + Add to Quote Add To Cart Add to Cart SMC VVQZ2000-20A-5 interface flow control, VQZ2000 VALVE, SOL 4/5-PORT***

SMC VVQZ2000-10A-5 blank plate assy, vqz2000, VQZ2000 VALVE, SOL 4/5-PORT*** $3.93 + Add to Quote Add To Cart Add to Cart SMC VVQZ2000-20A-5 interface flow control, VQZ2000 VALVE, SOL 4/5-PORT***

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Environment

Nil Without cable 2 2 5 5 A 10 !

Digital Flow Switch

Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer