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5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

Digital Flow Switch (Remote type sensor unit)

/520/540/511/521 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W504--T 81 50 PF3W520--T 89 54 PF3W540--T 109 71 PF3W511--T 135 92 PF3W521--T 115 74 PF3W521-F12-T 119 76 PF3W521-F14-T 123 78 -43No.PF-OMN0010-J PF3W504/520/540 (With flow adjustment valve) Basic type and flow adjustment valve Symbol A AA B D F K L N P Q Q: Number of rotations Model PF3W504S 104 50 63.6 (Max

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1 AS-FP w Meter-out type Meter-in type AS-FM AS-D Universal type AS-T Seal method: Gasket seal For Uni thread ASP !1 !1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

SZ3000

If connections are made incorrectly, failure may occur not only in the manifolds and valves, etc., but also in the PLC (control side) and power supply, etc. 9 Series SZ3000 Construction JIS symbol 2 position single 2 position single w e q r t y u o !0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !

CP95

1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Component Parts No. Description Material q Rod cover Aluminum die-casted w Head cover Aluminum die-casted e Cylinder tube Aluminum alloy r Piston rod Carbon steel t Piston Aluminum alloy y Cushion ring Brass u Tie-rod Steel i Tie-rod nut Steel o Rod end nut Steel !0 Snap ring Steel for spring !1 Bushing Lead-bronze casted !

CP95

1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts No.

Filter Regulator IW Series

Inlet valver Filter (Sintered metal)t IP Drain cock IW 1301 1301 Construction AW 1301 IL1 IL2 e IT CP Component Parts r Material IS Note Basic type External main parts: Stainless steel w No.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators HB HT HC X N A H HA CB W K 2 x plug 2 x P HP (Piping port) 4 x J x E T 4 x counterbore dia.

2 Phase Stepper Motor/Without Motor Brake Series LXS

pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension 6.5 Refer to Cross section C-C. 27.5 T-slot B 4H9 Cross section C-C Model D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70

Stainless Steel 316

Construction q w Material No.

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Membrane Air Dryer

w OUT IN Purge air for dehumidification Option With fitting for purge air discharge (Option: P) M V IN Purge air for dehumidification IDG3, 5 IDG3H, 5H IDG10, 20 IDG10H, 20H Option Option With fitting for purge With fitting for purge o t air discharge air discharge (Option: P) (Option: P) t plug IN OUT OUT IN !

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

KJ

H D MS T T (with seal) VMG Hexagon Socket Head Male Connector: KJS Connection thread (T) UNF NPT <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

Cylinder with Lock Series CLS

V W Select a graph based upon the load condition and operating pressure, and then find the point of intersection for the maximum speed found in Step 1 and the load weight. Select the bore size on the line above the point of intersection.

VK3000

) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Body ported Surge voltage suppressor Neon bulb LED Symbol Body ported Base mounted Indicator light At the rated voltage (B) 2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !