range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

) (kg)Circulating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

) (kg)Circulating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range

Drain Separator for Vacuum Series AMJ 1

NPT ZQ 06 3/4 10 1 ZF ZP Nil 2 6 J R Option/Combinations Combination available Combination not available ZCU Option Symbol Drain cock Nil AMJ Metal bow 2 Nylon bowl Misc. 6 Drain guide J Flow: Right Left R Model Model AMJ5000 AMJ4000 AMJ3000 Recommended flow rate (l/min(ANR)) 500 300 200 Port size (Nominal size B) 3/4, 1 3/8, 1/2 1/4, 3/8 Weight (kg) 1.1 0.6 0.3 Specifications Fluid Air

VXD

Voltage/Electrical entry Body material/Port size/Orifice diameter SizeValve type Electrical entry Voltage Symbol Size Valve type Orifice diameter Body material Port size Symbol Symbol Grommet A B C D E F 1/4 A 3 Aluminum 3/8 24 VDC N.C. 8A 1/2 10 10A 10 One-touch fitting 15A A Resin 3/8" One-touch fitting N.O.

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

AW30: G43-10-01-X3 or AW40: G43-10-02-X3 is included.

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

cylinder (10 to 110C) -XC6 Madeofstainlesssteel -XC8 Adjustablestrokecylinder/Adjustableextensiontype -XC9 Adjustablestrokecylinder/Adjustableretractiontype -XC10 Dualstrokecylinder/Doublerodtype*1 Single clevis Mounting C: Single clevis Pivot bracket N: Yes Rod end bracket V: Single knuckle joint Auto switch D-M9BW: 2 pcs.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Fluid temperature [C] 382 A

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required

range setting Note 1) (C)Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required