LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

LEF-OM006xx

20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 (W) 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102 (W) 5) 4 /9 4 /9 (W) 6) 70

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

. -3No.LEY*-OMZ0010 1Rod type / LEY Series 1.1 Specification Model LEY 25E-X8 LEY 32E-X8 LEY 40E-X8 (3000 [mm/s2]) 20 40 60 30 45 60 50 60 80 Horizontal Work load [kg] Note1) (2000 [mm/s2]) 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 7 15 29 10 21 42 12 26 52 Pushing force [N] Note2) Note 3) Note 4) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553

JXCx-OMY0008

Electric Actuators/Common Precautions 67 17.1 Design and selection 67 17.2 Mounting 68 17.3 Handling Precautions 69 17.4 Operating environment 70 17.5 Maintenance Precautions 71 17.6 Precautions for actuator with lock 71 18.

SFOD-OMT0005CN

(LE ) ,, () EMG() 1000 1 -69- /(Best Pneumatics No(2)) 17.2 () () -70- 17.3. 90 100 (DC24V)SVON () a) b) c) d) e) D (100) -71- 17.4. 1. 2. () 3. () 4. 5. 6. 7. 8. () 9. 1000m (-10603585%) -72- 17.5 5 17.6.

JXCx-OMU0026

/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min

JXCx-OMT0001CN

/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C Revision history 2015 9 2015 12 A 2016 3 B 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

JXCx-OMT0028CN

h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L)

IDX-OM-W037

Note : The filter check port applies to the type built-in filter. 70 389 498 15 2402 297 270 62 IDH Series 6.3 Dimensions IDX-OM-W037 Thermo-dryer 6.

HRX-OM-M005

Figure 5-70 MESSAGE Screen [Tips] The setting is not performed when the [NO] key is touched, which causes the CH1(2) Analog Output Setting screen 1, 2 where the box is flashing to be displayed. Procedure for initializing TYPE, SCALING, and LIMIT settings 1. Touch the [Initial] key. The MESSAGE screen is displayed. Figure 5-71 CH1(2) Analog Output Setting Screen 1, 2 2.

JXCx-OMT0002

JXC-OMT0002-C Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max.

A_HEC-OM-I009

Controller internal circuit 5 6 Excessive temp. increase Controller internal circuit Detects temp. input value not less than 70 C. Excessive temp. decrease Detects temp. input value not more than 0 C. Controller internal circuit 7 Works when temp. change is smaller than over load detection temp.

High Vacuum L Type Valve

185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.

LA-OMP0023

A B C D E F G H LAT3-50 50 75 6 25 150 140 54.5 70 14 - 3. 2 Card Motor Return to Origin The Card Motor uses an incremental type sensor (linear encoder) to detect the position of the table. Therefore, it is necessary to return the table to the Origin Position after the power has been switched on. There are three [Return to Origin Position] methods as described below.

Air cylinder

. -3- 2 Product Specifications 1) Specifications Bore size 125,140,160 180,200,250,320 Fluid Air Max. operating pressure 0.97MPa 0.7MPa Proof pressure 1.57MPa 1.2MPa Min. operating pressure 0.05MPa Piston speed 0.05~0.5m/sec Cushion Air cushion Air cushion + Bumper Ambient and fluid 0~70(No freezing) temperature J(Nylon tarpaulin) : 0~70(No freezing) Ambient temperature for K(Heat resistant

MONOSASHI-KUN

of 70 mm/s to 500 mm/s. In addition, have reproWhen cylinder speed is too fast, prevent knocking and bounding. ducibility. counting error may occur. Knocking or bounding may also cause temporal high speed. Do not give torque to the piston rod. , Is torque given to the piston rod?

MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 3/4 , AFM20-A 40 87.6 9.8 20 45 AFM30-A 53 115.1 14 26.7 30 50 AFM40-A 70 147.1 18 35.5 38.4 75 AFM40-06-A 75 149.1 20 35.5 38.4 75 Model Bracket mount dimensions AFM20-A 30 27 22 5.4 8.4 40 2.3 28 AFM30-A 41 35 23 6.5 13 53 2.3 30 AFM40-A 50 52 26 8.5 12.5 70 2.3

Fieldbus system PROFINET compatible SI Unit

End Plate EX245-EA2-1/2/3/4/5 70 10.1. Parts and description 70 10.2. Specifications 73 11. Accessories 74 11.1. Markers 74 11.2. Y Connector 75 11.3. Seal cap 77 11.4. Joint pack 79 12. Dimensions 80 12.1. The Modules Manifold 80 13. Troubleshooting 81 13.1. EX245-SPN1A/SPN2A/SPN3A 81 13.2. EX245-DX1 83 13.3. EX245-DY1 83 13.4.

3

MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L x 110L x 130L CQ-M8 x 95L x 105L x 115L x 135L 50 60 70