FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

FQ1

accuracy (m) 5 10 20 40 74 105 No.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Series VS

VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8-6 1.

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

Vacuum Pad with Ejector

Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

Body Size: 100 (M5, Standard), Material: None, Applicable Tube O.D.: 03 (ø5/32")

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 03 (ø5/32)

Size: 100 (M5 Standard), Control Range: FSC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 03 (ø5/32), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 03 (ø5/32), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 03 (ø5/32), Push lock: A (Push-lock)

Body Size: 100 (M5 Basis), Applicable Tube OD: 03 (Ø5/32")

Body Size: 100 (M5 Basis), Applicable Tube OD: 03 (Ø5/32"), Lock Nut: J (Round)

Body Size: 100 (M5 Standard), Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Standard), Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Standard), Indicator Direction: 1 (180°), Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Standard), Indicator Direction: 3 (270°), Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Standard), Indicator Direction: 0°, Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Standard), Indicator Direction: 2 (90°), Applicable Tube O.D.: 03 (ø5/32")

Body Size: 100 (M5 Basis), Applicable Tube OD: 03 (5/32"), Lock Nut: J (Round)