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B: Contents changed due to the change of the format. C: Revision. D: Contents revised in several places. E: Modified errors in text. F: Modified errors in text. G: Modified errors in text. [September 2017] H: Contents revised in several places.

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25

B Supply pressure and the Stopper screw (Do not move) OUT1 output are connected by rotating the Auto/Manual changeover screw towards M.

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Conformance) Conformance) ON OFF [B] Work piece is too small (Work piece is smaller than the upper limit. (Work piece is smaller than the lower limit. Conformance) Non-conformance) OFF ON [C] Work piece is too large (Work piece is larger than the upper limit. (Work piece is larger than the lower limit.

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

. / . 20 2 180 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2

W&F Contact B OUT6 N/A Output signal: OFF (open) for normal operation 4 OUT1 to OUT6 Contact A, B Output signal A: Contact A, B: Contact B Same as above Used to display the 5 [Enter] key MESSAGE screen to accept the setting. Used to display the MESSAGE screen to initialize the settings of RUN, REMOTE, and 6 [Initial] key OUT1 to OUT6. 7 [Cancel] key Used to cancel the setting.

If a single-solenoid valve is mounted on the standard wiring manifold, the output number for the B side valve is skipped. : Custom wiring for mixed mounting single-solenoid valves and double-solenoid valves can be specified with a Wiring Specification Sheet.

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) Semi-standard G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch PNP open collector 1 output EB EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

The angle adjustment range of the bracket is 50 degrees in direction A, and 90 degrees in direction B. 2) Installation without bracket Direction B 90o Direction A 50o M5 If a bracket is not used, install the product using the M4 screw holes (depth: 6 mm) on both sides of the body. Be sure to secure both sides of the body when fixing this product.

Analogue output A B C Voltage output 1 V 1.5 V (1.4 V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA : The value in ( ) is when PF2W711 is used. Rated flow range Model Min. Max. PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision.

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) Semi-standard G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch PNP open collector 1 output EB EB EB EB NPN open collector 1 output + Analog voltage output EC EC EC EC NPN open collector 1 output

Remove the clips, cap B assemblies, and cap C assemblies. 3. Remove the pinion. (Make sure to align the groove of the rack and the pinion shaft when they are Guide bolt Hexagon wrench size Hexagon wrench Nominal 8 2 Finger assembly Body assembly Clip Cap B assembly Cap C assembly assembled.) Pinion 4. Remove the rack assembly, and replace the seals with new ones.

Fig. 3-2 [Ex.-2] 5 Guide shaft Bearing Load base A B External slider Cylinder tube Detail of A Wrong example Correct example View A Load base Load base External slider External slider Spacer Clearance Detail of B Detail of B By tightening of the bolt, the load base and Insert the spacer to keep flexibility in cylinder body and load base even after the bolt is tightened. cylinder body are