Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page
Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14
VR VR51 VR51 Supply pressure and piping length at the outlet side VHK 50 Outlet piping length (m) VH 40 VHS 30 20 VHS 10 0 0 0.2 0.4 0.6 0.8 1 Supply pressure (MPa) When the piping length is long and capacity is large due to a branch, install a speed controller (AS2051F-06, AS3001F-06, etc.) close to the A port of the VR51 in accordance with the below figure.
When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN
Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14
Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 150, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~60, Support Type: [Clevis] Single Clevis, Standard: JIS Specifications, Nominal
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 25, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~60, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard:
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 50, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard:
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 60, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10~60, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard: JIS Specifications
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 100, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~60, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 130, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 200, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15~14, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8~300, Piston Packing Material: NBR, Stroke(mm): 250, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10~80, Support Type: [Head Side Flange] Head-Side Rectangular-Flanged Type, Standard
Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 14, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20~70, Operating Pressure(MPa): 0.05~1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in
Delivery Pressure: L [15 to 2500 psig (0.1 to 17.2 MPa)], Relieving: 1 (Self Relieving, Standard), Connection 1: FV4 (1/4 Inch Face Seal, Female), Connection 2: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: 40 [4000 psig (28 MPa)], Gauge Port, Outlet: 20 [2000 psig (14 MPa)], Pressure Gauge: psig/bar, Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard, Flow
Bore sizes (nominal): 1/4", 3'8", 5/8", 3/4", 1", 1-1/4", 1-1/2"; Stroke length: 2", 4", 6" 8", 10", 12", 14", 16", 18", 20", 24", 28", 32", 36", 40", 60"; Minimum operating pressure: 26 psi; Speed: 2 ~ 20 inch/sec.; Auto switch capable
Bore sizes (nominal): 1/4", 3'8", 5/8", 3/4", 1", 1-1/4", 1-1/2"; Stroke length: 2", 4", 6" 8", 10", 12", 14", 16", 18", 20", 24", 28", 32", 36", 40", 60"; Minimum operating pressure: 26 psi; Speed: 2 ~ 20 inch/sec.; Auto switch capable