AMF

4B flange 20 2B flange 30 3B flange 40 4B flange Vessel shape Piping support type Self-standing type 60 6B flange Model Selection Max.

XLA- ∗ -F7NJ ∗ - ∗ Series

J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

For D-P4DW, 40 to 63 are available. Only D-P4DW type is assembled at the time of shipment. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are other applicable auto switches than listed, refer to page 18 for details.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth

Series VS

D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T

Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

EX500-GPR1A.eng

BF SOL RUN Display Description NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light. To make them light, connect a terminal plug to the unused connector of SI unit ( "C1" or "0" ). Settings for display Turns on: COM D is receiving data. Turns off: COM D has no received data. Turns on: COM C is receiving data.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

LEC-OM032xx

Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12. Precautions for controlling the controller (LEC).43 12. 1 Communication delay between the gateway unit unit and the controller(LEC) 43 12. 2. Guideline of the Response delay between the Gateway and the Motor Control Unit .44 13.

Digital Flow Switch

Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead wire with M8 connector (ZS-40-A) -72No.PF-OMS0002-B Revision history A: Contents revised in several places.

XSA Series

50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 5 10 13 XSA-OMS0001-A 4.

AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C D E F Dimensions Part no.

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

The load does not work. -15No.D-#S-OML0002-B Specification Specifications Auto switch model D-P3DW Wiring 2-wire Output Applicable load 24 VDC Relay / PLC Load voltage 24 VDC (20 to 28 VDC) Load current 6 to 40 mA Internal voltage drop 5 V or less Current leakage 1 mA or less Operating time 40 ms or less Indication light Operating range: The red LED lights up.

MX-OMP0051

50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 D-M9V/M9WV A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2 2.6 5.6 7.6 7.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 7.1 7.1 7.1 13.1 30.1 7.1 MXQ12(A,C) 16.5 16.5

MQQ

Action D Double acting Mounting Cylinder stroke B L F G D Note) Through hole & Double end tapped (Standard) Foot type Rod side flange type Head side flange type Double clevis type Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available with the MQQL only. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.