MXH Series Compact Slide

5 5 2pcs. 10 5 10 Weight Table (lb) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 MXH6 MXH10 MXH16 MXH20 0.14 0.15 0.17 0.18 0.20 0.21 0.24 0.28 0.31 0.26 0.28 0.31 0.33 0.36 0.37 0.42 0.47 0.52 0.48 0.50 0.54 0.57 0.62 0.64 0.71 0.78 0.85 0.96 1.00 1.07 1.11 1.19 1.23 1.32 1.45 1.54 27 MXH Series Compact Slide Model Selection Method Caution Separate confirmation of the theoretical output

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications 5. Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6.

VCA

size (mm) 4 5 7 10 Symbol 4 5 7 10 Class 3 Class 4 Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Manual override None Slotted locking type (tool required) Nil B Consult SMC regarding other voltages.

RSH

5 !6 !7 !8 !

IDX-OM-U010

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

MRQ

5 !6 !7 !8 !

MHx-OMZ0003

4 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-5. 1.

MHx-OMZ0004

M3x7 0.59Nm 17 - 12 (No.1No.4)KQ2L04-M3G1 KQ2L04-M3G1 2(TCU0425B-1) 3(M44 ) TCU0425B-1 44 (No.1No.4)6 () 5(KQ2H04-06A1)1)4 6 () 4 6 KQ2H04-06A1 18 - () 19 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

VF1000-OMP0001

5 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / DC 1 1 ()ISO VG32 (MSDS) 2 ()ISO VG32 M5 M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32

Series AK1000

RX-RRD-5M

MHx-OMZ0005

M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

Compact Cylinder with Lock Series CLQ

Nil (Example) A80C 5m .. Z (Example) A80CZ 3m . L (Example) A80CL None ...

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

L (Example) F9BL 5m .

PSxx-OMU0008CN

/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Membrane Dyer Series IDG Standard specifications/Single style (standard dew point 20C) Model Standard dew point 20C IDG5 IDG10 IDG20 IDG30 IDG50 Fluid Compressed air Macromolecular membrane dryers that act like filters Range of operating conditions Standard performance conditions Inlet air pressure MPa 0.3 to 0.85 0.3 to 1.0 Inlet air temperature C Note 1) 5 to 55 Ambient temperature C 5

3 Position Cylinder Series RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52

PSxx-OMF0005CN

0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 ()