ACG

Mounting angle view (-R specification) MPa OUT IN K P C U O S L H to 2

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

1 u i o !0 q Size 48 mm T w Bearing type e Equivalent lead r Stroke t Motor option M L Sliding bearing Ball bushing bearing 25 100 Without option With lock With motor cover to 100 mm Nil B C to 1000 1000 mm Refer to the applicable stroke table.

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Cable Motor In-line motor type/D type Cable Table D Motor r Lead [mm] t Stroke [mm] LES8 8 4 LES16 10 5 LES25 16 8 Stroke Symbol J K 30 125 150 100 50 75 Model LES8 LES16 LES25 R/L type with lock is not available. u Body option y Motor option Nil S Without option Dustproof specification Nil B Without option With lock For R/L type (IP5X equivalent), a scraper is mounted on the rod cover

Cylinder Positioner IP200 Series

Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u. This diaphragm A u has larger area than diaphragm B i resulting in movement of the spool to the left. Supply pressure then ows to OUT1 q and partial exhaust from OUT2 takes place resulting in cylinder rod t movement to the right.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Example) -2M9NL Symbol Quantity Mounting position Nil Without auto switch A 2 Valve open/closed B 1 Valve open C 1 Valve closed u Body surface treatment/Seal material and changed parts Bodysurfacetreatment Partwithchangedsealmaterialandleakage Symbol *2 Changed part Symbol Surface treatment Nil External: Hard anodized Internal: Raw material A External: Hard anodized Internal: Oxalic acid

Model: 10 (Side Ported), Number of Cores - Lead Wires: L3 (9 Cores), Lead Wire Length: 1 (0.6m), Valve Stations: 4 Stations, P, E Port Locations: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 8 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 10 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Type: 10S (Side Ported), SI Unit Specification: FB (PROFINET - 16 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 2 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option

Type: 10S (Side Ported), SI Unit Specification: FB (PROFINET - 16 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 3 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option

Type: 10S (Side Ported), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Type: 10S (Side Ported), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 6 (for 6 Stations

Type: 10S (Side Ported), SI Unit Specification: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 6 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 7 (for7 Stations

Type: 10S (Side Ported), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 5 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)