Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

AC Servo Motor Driver (Pulse input type/Positioning type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

CXS

B A C B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

MY1

Grommet (In-line) D-F9I Grommet (Perpendicular) D-F9IV Grommet (2 color indicator, In-line) D-F9IW Grommet (2 color indicator, Perpendicular) D-F9IWV Solid switches Grommet (In-line) D-Y59A, Y59B, Y7P Grommet (Perpendicular) D-Y69A, Y69B, Y7PV Grommet (2 color indicator, In-line) D-Y7IW Grommet (2 color indicator, Perpendicular) D-Y7IWV Specific product precautions Be sure to read before

REA/REB

Electrical entry (Fetching direction) D-A90 D-Z80 D-Y69A D-Y69B D-Y7PV D-Y7NWV D-Y7PWV D-Y7BWV Type Model Features Grommet (In-line) Reed switch Without indicator light 3-wire (NPN) 2-wire 3-wire (PNP) Solid state switch Grommet (Perpendicular) Diagnostic indication (2-color indication) Normally closed (NC = b contact), solid state switch (D-F9G/F9H/Y7G/Y7H type) are also available. 10-2

REA/REB

Electrical entry (Fetching direction) D-A90 D-Z80 D-Y69A D-Y69B D-Y7PV D-Y7NWV D-Y7PWV D-Y7BWV Type Model Features Grommet (In-line) Reed switch Without indicator light 3-wire (NPN) 2-wire 3-wire (PNP) Solid state switch Grommet (Perpendicular) Diagnostic indication (2-color indication) Normally closed (NC = b contact), solid state switch (D-F9G/F9H/Y7G/Y7H type) are also available. 10-2

CJ2

D-H7 D-H7W D-H7BAL D-H7NF 2 (same surface) 60 Band mounting 2 (different surfaces) 20 1 20 2 (same surface) 65 D-C73C D-C80C D-H7C 2 (different surfaces) 15 1 15 2 (same surface) 65 2 (different surfaces) 25 D-H7LF 1 25 Precautions 2 10 D-A7/A8 D-A73C/A80C 1 5 2 5 D-F7V D-J79C Refer to p.1.3-3 before handling. 1 5 Rail mounting 2 15 D-A79W D-F7WV 1 10 D-F7, J79, D-F79F, D-A7H, A80H D-F7W

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.

1

Precautions mm : D 6 D 1 mm, 6 < D 25 D 2 mm, D > 25 D 4 mm inch : D 0.23 D 0.04 inch, 0.23 < D 0.98 D 0.08 inch, D > 0.98 D 0.16 inch 3. In the case of double rod type and single acting retraction type, enter the dimensions when the rod is retracted. 4. Only the single side of a double rod is able to manufacture. 1.

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

Cylinder with Lock

= 2, 3, 4) D-A44 n (Same surface) 55 + 50 (n 2) (n = 2, 3, 4) 1 10 D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 1 10 25 2 (Different surfaces, same surface) 1 15 20 D-A5 D-A6 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 60 + 55 (n 4)/2 n = 4, 8, 12, 16 110 + 55 (n 4)/2 n = 4, 8, 12, 16 115 + 55 (n 4)/2 n = 4, 8, 12, 16 120 + 55 (n 4)/2 n = 4, 8, 12, 16 20 + 55 (n 2)/2 n = 2, 4, 6, 8 25 + 55 (n 2)/2 n = 2, 4, 6, 8 70 + 55 (n 4)/2 n = 4, 8, 12, 16 85 + 55 (n 4)/2 n = 4, 8, 12, 16 60 70 85 110 115 120 15 25 With 1 pc. D-F5 D-J5 D-F5W D-J59W D-F5BA D-F59F With 2 pcs.

MB

25 25 30 2 (Different sides or Same side) 15 C85 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 30 + 55 n = 2, 4, 6, 8 n (Same side) D-F5NTL C95 1 10 25 30 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 15 CP95 (n2) 2 15 + 40 n = 2, 4, 6, 8 n side NCM 2 (Different sides or Same side) 1 10 D-Y69 D-Y7PV D-Y7WV NCA (n2) 2 10 + 30 n = 2, 4, 6, 8 n D2 (Different

Brake mechanism added

) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 140 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 25 + 55 (n 2) 2 130 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) (n 4) 2 n (Same surface) (Different surfaces) (Same surface) 15 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BA D-G59F D-G5NT 2 2 n n 75 90 100 110 (n = 2, 4, 6, 8, ) Note 1) 15 + 50 (n 2) 2 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12,

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) Different surfaces 90 90 120 15 2 pcs. "n" pcs. 2 pcs.

CG1

(2 colour, Diagnostic output) D-H7BA 5.3-55 Grommet (2 colour, Water resistant) Solid state switch D-H7C 5.3-31 Connector D-G5, K5 5.3-30 Grommet D-G5W, K59W 5.3-43 Grommet (2 colour) D-G59F 20 to 100 5.3-51 Grommet (2 colour, Diagnostic output) D-G5NT 5.3-59 Grommet (With timer) D-G5BA 5.3-56 Grommet (2 colour, Water resistant) Precautions Be sure to read before handling.

ISO Standard Hydraulic Cylinder

D-M9 D-M9W D-M9A D-M9V D-M9WV D-M9AV Bore size (mm) 80 Auto switch model (n 2) 2 40 50 63 100 20 + 40 20 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-A5/A6 D-A59W D-Z7/Z80 (n = 2, 4, 6, 8 ) Note 1) 4.5 5 6 7.5 9 (n 2) 2 20 + 30 20 (n = 2, 4, 6, 8 ) Note 1) 4 4.5 4.5 5.5 5.5 D-F5/J59/F5W D-J59W/F5BA D-F59F/A5/A6 (n 2) 2 20 + 55 20 10.5 12 14.5 (n = 2, 4, 6,

SX

Serial unit can be mounted on D side only. Valve stations SUP/EXH block assembly mounting position Note Stations Symbol 02 2 stations Mounting position Symbol Stations Double wiring specifications D U D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations 08 8 stations How to Order Valves 02 2 stations Applicable up to 16 solenoids.

4/5 Port Solenoid Valve

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Body ported Base mounted Grommet (G), (H) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W) 2 position single 2 position single solenoid (A) 4 (B) 2 (A) 4 (B) 2 Electrical entry 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) G, H, L, M, W 24, 12, 6, 5, 3 D 24, 12 DC AC 50/60 Hz 2 position double