Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: DG (D + G), Attachment: V (3-Port Valve for Residual Pressure Release), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 40A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: DG (D + G), Attachment: SV (S + V), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: DG (D + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)
Body Size: 40A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: DG (D + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: CG (C + G), Attachment: S (Pressure Switch), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 40A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: S (Pressure Switch), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 8 (Metal Bowl with Level Gauge), Semi-Standard 2: Standard
Body Size: 40A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: S (Pressure Switch), Semi-Standard 1: Standard, Semi-Standard 2: Standard
Body Size: 40A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard
VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,
oC Detection method Heating type sensor (branch flow type) Rated flow range 10 to 1000 L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Flow specifications Instantaneous flow 1 L/min 2 L/min Minimum resolution Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)
position Retracted end Bore size 6, 10, 15, 20 to 32 Locking position Both ends Bore size 10, 16 to 32 Series MTS Series MXS Series MXQ Series MY1H Locking position Retracted end Bore size 12, 16 to 40 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Both ends Bore size 16 to 40 6 8 10 12 15 16 20 25 32 40
20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features
.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.
Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.