Fluoropolymer Tubing Variations

Operating Pressure MPa TIHB05/TIHB11 2 TIHB07 TIHA01/TIHB01/TIHA05 TIHA07/TIHA11/TIH13 How to Order Inch size TIHA01 N 16 1 TIH19 0.5 Length per roll Indication of tubing model Color indication Roll size 16 m (50 ft) roll 33 m (100 ft) roll Symbol 16 33 Note) Color Symbol N R BU B 0 -20 0 20 40 60 80 100120140160180200 Translucent (Material color) Red (Translucent) Blue (Translucent) Black

AIR COMBINATION

56 59.9 11 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-B 1/8 83.2 87.6 26.5 41.6 25 28.5 2 30 24 33 5.5 12 3.5 29 Note) 1/81/4 1/43/8 1/43/8 AC25B-B 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 1/43/81/2 AC40B-06-B 1/8 155.2 149.1 35.8 38.4 77.6 40

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

Compact and Lightweight

-16 9.1 mm Max.74% reduction (65.1 g lighter) Weight L-bracket mounting DIN rail mounting Current model ZH20DA-10-12-12N ZH20D-12-16-16 23.3 g 88.4 g Variations Model Nozzle nominal size [mm] Vacuum pressure reached [kPa] Maximum suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Type S Type L Type S Type L ZH05DA 0.5 6 13 13 ZH07DA 0.7 12 28 27 ZH10DA 1.0 26 52 52 ZH13DA 1.3 40

CE

49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12

HRX-OM-Z002

. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40. 9-12 9.5 COOLING CAPACITY . 9-13 9.5.1 HRLE050-A-20. 9-13 9.5.2 HRLE050-W-20. 9-13 9.5.3 HRLE090

Process Valve Series VNA

25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

PFxx-OMY0005

System error (Er0, 4 to 16, 40) is displayed Incorrect internal data processing of the product (Er0, 4 to 16, 40) (2) Check if the power supply voltage is in the range 21.6 to 30 V. "HHH", "LLL" is displayed (2) Check that the Power supply voltage is 21.6 to 30 V. (1) Return the value to within the set range. (1) Check if the value exceeds the upper or lower limit of the set range.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

PFxx-OMX0007

A to B C to D 1,000 L 10 to 1000 10 to 1050 40 to 4000 40 to 4200 L/min 2,000 L 20 to 2000 20 to 2100 40 to 4000 40 to 4200 PF3A7#H 1,000 L 0.4 to 35.3 0.4 to 37.1 40 to 4000 40 to 4200 cfm 2,000 L 0.8 to 70.6 0.8 to 74.2 40 to 4000 40 to 4200 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole