20

8 O-ring O-ring Parallel pin 15 16 17 18 19 NBR NBR !3 Stainless steel Stainless steel Stainless steel Cross recessed round head screw Hexagon nut Note) Grease is used on rubber and sliding sections.

SI unit for EtherNet/IP TM

Active: Force output mode enabled Inactive: Force output mode disabled 2 Force output 3 Module status SI unit operating condition. 16 In/32 Out Device Operational: Normal operation Displays the communication status of the SI unit EtherNet/IPTM.

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Allowable load mass on guides and moment 17/28 18/28 19/28 20/28 21/28 22/28 5.

SL5200

psig (0.69 MPa) inlet Inlet pressure: 50 psig (0.34 MPa) inlet 0.97 (24.6) 70 0.48 60 0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32

PA300/500/700

55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA54231 83.9 26.1 Rc 1/8 3.5 NO NC (PA port) 32

PA3000/5000/PAX1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

Pin Clamp Cylinder C(L)KQG32 Series Compact Cylinder Type 32 How to Order Clamping height LOW type KQG C X2081 B L 32 075 R A L C X2082 KQG C Clamping height HIGH type B L 32 075 R A H C Number of auto switches Nil 2 pcs. S 1 pc.

IDX-OM-W011

10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 (3) AC100V 10A AC200V 5A 10A R134a(HFC) AC100V/200V g 705 1155 1505 1805 2005 2505 2605 35010 Rc3/8 Rc1/2 Rc3/4 Rc1 10mm 1 2 kg 16 17 18

KFx-OMY0034

Applicable tubing FEP, PFA, Modified PTFE, 2-layer soft fluoropolymer, Nylon, Soft nylon, Polyurethane, Soft polyurethane, Polyolefin, Soft polyolefin, Tubing material Note1) Note2) Antistatic soft nylon, Antistatic polyurethane, Hard polyurethane 4x2.5, 4x3, 6x4, 8x6, 10x7.5 10x8, 12x9, 12x10, 16x13 Tubing size 1/8"x0.086", 5/32"x0.098", 1/4"x5/32" 5/16"x0.236", 3/8"x1/4", 1/2"x3/8" Note1

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 part (Electroless nickel Piping port POM, SUS304, NBR, C3604 plating), SUS304,

KFx-OMV0011

Table of applicable tubings (metric size) FEP, PFA, Modified PTFE, 2-layer soft fluoropolymer, Nylon, Soft nylon, Polyurethane, Hard polyurethane, Soft polyurethane, Polyolefin, Soft polyolefin, Wear Resistant Tubing , Antistatic soft nylon, Antistatic polyurethane 4x2.5, 4x3, 6x4, 8x6, 10x7.5 10x8, 12x9, 12x10, 16x13 1/8"x0.086", 5/32"x0.098", 1/4"x5/32" 5/16"x0.236", 3/8"x1/4", 1/2"x3/8

Support Guide/11-LEFG Series

LEY LES Support guide (11-LEFG) LEPY LEPS How to Order LER LEH 200 S LEF 11 G 32 LEY -X5 q w e Clean series 11LEFS 11LEFS Support guide 11LEJS q Size w Type of mounting pitch e Stroke [mm] Symbol 11-LEFG16 11-LEFG25 11-LEFG32 11-LEFG40 Note 25A50 50 to to 1000 1000 16 25 32 40 S Ball screw drive Step motor/Servo motor (24 VDC)/AC servo motor LEC LEC S Applicable Stroke Table Ball Screw Drive

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

AMH

Refer to Flow Characteristics (page 14-20-32) and figure of Max. Air Flow (page 14-20-30).

Fieldbus system IO-Link Setting tool

EX9-ZSW-LDT1 Minimum System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 2GB Free hard disk space 150MB Processor 1GHz or higher,32-bit(x86) or 64-bit(x64) Screen resolution 800 600 pixels Recommended System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 8GB Free hard disk space 250MB Processor 1GHz or higher