Metering Valve with Silencer Series ASN2

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

Micro Mist Separator

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

VT307

Max. 10 VZ VS VFN Mounting bracket (A port) P = 26 L Dimension n: Stations n L L1 L2 Formula L1 = 26 x n + 36 L2 = 26 x n + 10 2 88 62 3 114 88 4 140 114 5 166 140 6 192 166 7 218 192 8 244 218 9 270 244 10 296 270 [ ]: With light/surge voltage suppressor 4-7-7 8 Series VT307 Dimensions: Individual Exhaust (Interchangeable with VT301 for mounting) VV307-01-3--F P = 26 (Applicable cable O.D

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

High Purity Fluoropolymer Needle Valve Series LVN 1

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

IDX-OM-W095

R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80

Smooth Vent Valve

Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

ELECTRO-PNEUMATIC POSITIONER

10 3.Attaching Warning !

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

HEC-OM-R008

The allowable upper and lower range of temperature can be set between 0.1 and 10 C. Feb P TP UP VP . ZP AP BP . maintain the temperature stability. Therefore, the length of the external piping should be minimized and internal diameter should be as large as possible. Piping must have sufficient strength for the maximum discharge pressure of the circulating circuit. Mar Q TQ UQ VQ .

TM

(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

Fan Type Ionizer

Accessories Power supply cable IZF10R Fan type Bracket Nil None B With Bracket Max. air flow: 0.80m3/s Power supply cable, AC adapter Output specification Nil With power supply cable (3 m) Nil NPN output Z With power supply cable (10 m) P PNP output Q With AC adapter (with AC cord) R With AC adapter (without AC cord) N None C IZF10R Power supply cable, AC adapter P With power supply cable

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 10 8 6 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

20

1 u r e q w Material Description No. Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT o t POM Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12m PBT Stainless steel Stainless steel PBT !4 Stainless steel HNBR PBT !5 !0 Only for the VMG11m Combined with the elbow u. !

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

4 q !0 !3 i Component Parts No.

SI unit for EtherNet/IP TM

Fault No.10 Fault Probable cause Recommended error handling Recommended action SI unit NS LED is green flashing Refer to the master device manual, and review the settings.

LFE-OMY0008

L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 16 No.LFE*-OMY0008 FR0( FR0( FR0( FR0( ) ) ) ) FR1 FR1