CL

D C B H d Tube I.D.

Electric Actuator/Slider Type

LE-CSM-R is MR-PWS1CBL M-A -H manufactured by Mitsubishi Electric Corporation. LE-CSB-R is MR-BKS1CBL M-A -H manufactured by Mitsubishi Electric Corporation.

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

Fieldbus system (DeviceNet compliant)

-H Output unit Summary of Product Parts No.

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

Direct Operated

D N S Q J P B C K Note 1, 2) C37 B PPS Water NBR NBR Stainless steel C37/Cu Stainless steel H Heated water EPDM EPDM Stainless steel/Ag C37 PPS B Stainless steel Oil Note 3) FKM FKM C37/Cu Stainless steel H Stainless steel/Ag C37/Cu Stainless steel H COM. only PTFE FFKM Steam (Max.183C) Stainless steel/Ag B PPS Stainless steel EPDM EPDM Copper-free, Fluoro-free Note 5) H Stainless steel

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H

Electric Actuators

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order Clean Room Specification Series LJ1H10 High Rigidity Direct Acting Guide Type Motor Output: 50W/100W How to Order Motor output: 50W F P 2 B 1 X60 Stroke 1 LJ1H10 Horizontal

Compact Manifold Regulator Series ARM5

ITV IC SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC SMC SMC SMC SMC MADE IN JAPAN PVQ K K K P P P C C C U U U K K K P P P O O O S S S C C C L L L H H H U U U O O O S S S L L L H H H VEF VEP Front handle/Bottom ported Front handle/Top ported Mixed manifold Mixed manifold Types and sizes of the One-touch fittings can be changed.

Tie-rod Type Hydraulic Cylinder

J H N M Spring pin Applicable cylinder type Order no.

CNA

X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

CNA

X Y BN N T LX h + l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke B Long Stroke When stroke exceeds 1000 mm, mount tie-rod support ring.

1.1

HRG-BP005 A Connection thread Note) D Connection thread E H B C (mm) H (Width across flats) Connection thread R, Rc Mass (kg) Part no.

CNA

X Y BN N T LX h + l CXT l S + Stroke LS + Stroke ZZ + Stroke Z ZZ + l + Stroke l lB MX MXU When stroke exceeds 1000mm, mount tie rod support ring.

AC Servo Motor Driver (CC-Link Type ）

MR-EKCBL30M-L MR-EKCBL30M-H MR-EKCBL40M-H MR-EKCBL50M-H The other encoder cables are all of 2-wire type. Incorrect setting will result in an encoder alarm 1 (A16) or encoder alarm 2 (A20). The following cables are of 2-wire type.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

I Type Single Knuckle Joint Rod End Nut (Standard) NDH10 30 MM 45 RR1 d E1 D C A1 L1 U1 NX H B A [mm] Material: Free cutting sulfur steel [mm] Material: Rolled steel Applicable bore size [mm] A A1 E1 L1 MM NDH10 NX R1 U1 Part no. Applicable bore size [mm] B C D d H Part no.

Parallel Style Air Gripper Series MHZ

H H L L Gripping point Gripping point Gripping point L and H are appropriate L is too long H is too long 5. Attachment should be designed as light and short as possible. 1) A long or heavy attachment increases the inertia force to open or close the fingers.