Guide Table Series MGF ø40, ø63, ø100 1 If a greater rotational torque is applied, the non-rotating rod (page 8-23-9) bends, exceeding the value of the nonrotating accuracy. 100 13 17 22 30 8-23-4 5 Guide Table Series MGF Operating Conditions Allowable horizontal load Allowable eccentric load The maximum value of load which can be applied at an eccentric position at a distance of l (mm) from the cylinder center. l l m m0 MX MTS
7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings
Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings
Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings
Expelling contaminants outside a clean room can either be done by: (21-) exhaust relief or (22-) vacuum relief. The clean CXSL high precision ball bushing bearing type allows for smooth operation that ensures stable travel resistance. The clean CXSM slide bearing type provides lateral stability protecting it from side load impacts.
Expelling contaminants outside a clean room can either be done by: (21-) exhaust relief or (22-) vacuum relief. The clean CXSL high precision ball bushing bearing type allows for smooth operation that ensures stable travel resistance. The clean CXSM slide bearing type provides lateral stability protecting it from side load impacts.
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV6 (3/8 Inch Face Seal, Female), Connections, Outlet: FV6 (3/8 Inch Face Seal, Female), Gauge Port, Inlet: No
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No
Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 10 μin. (0.25 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 10 μin. (0.25 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port
Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SHP (Body: 316L SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 10 μin. (0.25 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge
Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: No Gauge Port, Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: