Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) CP95 Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 NCM NCA DOperating Range -X Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 208 10 9 10 10 11 D-B59W

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

133 14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 24 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 D Scale: 37% [With external pilot] 2-One-touch fitting (P, R ports ) Applicable tube O.D.: 8 13.3 (Pitch) P = 10.5 21.3 21.3 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

Rotary Clamp Cylinders

0.15 17 17 10 0.07 0.15 2 x 4 x M6 x 1.0 4.5 C A R Q Through-hole/Both Ends Tapped Common (Standard) (mm) Clamp stroke 20 mm Clamp stroke 10 mm Bore size A B C Q R S Q R S 20 25 136.5 130.5 69 36 47 25.5 116.5 110.5 59 139 133 69 40 52 28 119 113 59 23 Rotary Clamp Cylinder: Double Guide Type Series MK2T Dimensions: 32, 40, 50, 63 E 4 x F A B E B D 10 D C A F C G Head End Flange (mm) With

Air Cylinder

G G 4 x J Width across flats KA MM RY D E d e C B H1 10.2 L f B1 AL h + L C B A K ZZ + L + Stroke F N RT N M S + Stroke H ZZ + Stroke (mm) M Bore size Stroke range AL B B1 C D E F G H1 J K KA (mm) A (mm) Without reinforcement ring With reinforcement ring 40 50 63 80 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21

Rotary Table/Rack & Pinion Style Series MSQ

CRQ2X MSQX MRQ Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch D-M9(V), D-M9W(V) D-A9, D-A9V Size Rotation Hysteresis angle Hysteresis angle Operating angle m 10 10 10 10 10 10 10 Operating angle m 10 10 10 10 10 10 10 A B A B 90 80 65 50 45 40 35 55 45

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

V

A M E T E R S 20, 25, 32 Model A B C D E F G H I Y ZPR10D 10 12 15 24 32.9 49 60 83 94 6 ZPR16D 16 18 16 25 33.9 50 61 84 95 7 A P P L I C A B L E T U B E Applicable Tube O.D.

JXCx-OMU0004

P.24 6 I/O 7.1 P.256.3 P.21 10 No.JXC-OMU0004-A 3. 31 2 HB DC24V102 (1) * UL , UL1310 Class2 6 () 6 () 14 114E A/B 800p/r EEPROM LED LED/1 7 LED 1 7 3 16 10 [10][15][A][F] I/O 5m 20m [] 040 [%RH] 90 ) [] -1060 90 ) [RH] 50MDC500V 130g 150gDIN 1 2 37 LED 10 [10][15] 10 10 11 12 13 14 15 16 A b c d E F 11 No.JXC-OMU0004-A 3.2 PWR LED ON/ : ON/OFF : ALM ON/ ON/: LED

Combination Cylinder

10 10 10 62 70 74 84 4 4 4 4 CL MLG Refer to p.3.1-30 for long stroke dimensions.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

5 Port Air Operated Valve Series SYA3000/5000/7000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

A

mm C mm S Y M B O L S AMG150 14 170 63 10 AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 10-20-23 Solid state switch Reed switch Rail Grommet 10-20-24 Tie-rod Grommet 10-20-25 2-color indication 10-20-42 Band Grommet RE A B 10-20-43 10-20-44 Rail Grommet REC 10-20-45 Tie-rod Grommet 10-20-46

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.

MXQ

NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2

CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.