CC

E101. 10-17-16

CE

M9NWV D-M9NWV A93V D-A93V M9PV D-M9PV M9PWV 2 D-M9PWV A96V D-A96V M9BV D-M9BV M9BWV D-M9BWV A72 D-A72 F9G D-F9G F79W D-F79W A73 D-A73 F9H D-F9H F7PW D-F7PW A80 D-A80 F79 D-F79 J79W D-J79W A72H D-A72H F7P D-F7P F7NWV D-F7NWV A73H D-A73H J79 D-J79 F7BWV D-F7BWV A76H D-A76H J79C D-J79C M9NA D-M9NA A80H D-A80H F7NV D-F7NV M9PA D-M9PA A73C D-A73C F7BV D-F7BV M9BA D-M9BA A80C D-A80C F7PV

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(mm) Connection thread M3 x 0.5 M5 x 0.8 Weight (g) Connection thread H A B C D E F M Applicable tubing Model M q w e M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 / 1 .2 4 2.5 Component Parts No. 1 2 3 Description Sleeve Barb fitting Gasket Material C3604 C3604 Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel 304 B C Width across flats H A Barb

CC

E101. 10-17-16

High Vacuum L Type Valve

frequency 10 cycle times/ min.

Switches

(between lead wire and case) Indication light Lights when ON OUT Black [White] Ambient temperature 10 to 60C Operating time 1ms or less DC () Blue [Black] Impact resistance 1000m/s D-Y7GL Auto switch part no. D-F9B N.C.

EX500

24VDC COM A COM B COM C COM D Branch connector Note 2) Marker: BN-WH (Made by Phoenix Contact) Branch connector Note 2) Marker: BN-WH (Made by Phoenix Contact) 160 136 160 136 48.8 49.9 46 46 10 10 EX500-GEN1 (EtherNet/IP) EX500-GMJ1 (CC-Link) Switch protective cover Switch protective cover 148 Communication connector (M12, 4 pins, socket type D) M3 Ground terminal Bus adapter 148 LINK IN

Line filter

Assembly of Optional parts (P19) for mounting the bracket assembly. -10- 6. Bowl assembly specifications 1) Bowl assembly / auto drain for AFF20 Option symbol Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No.

MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

LEC-OM036xx

CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Micro Mist Separator

Assembly of Optional parts (P19) for mounting the bracket assembly. -10- 6. Bowl assembly specifications 1) Bowl assembly / auto drain for AMD20 Option symbol Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No.

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

ELECTRO-PNEUMATIC POSITIONER

10 3.Attaching Warning !

2/3 Port Valve for Various

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Title not found

-32 Thru 10-32 * Lock nut and washer included C Thread 9/32 7/16 Hex 5/16 Hex 1/2 D B Hex 1/4 1/4-28 3/8-24 A Thread 71 RB 4-28-10 * RBB 3/8-10 R e d u c e r B u s h i n g D i m e n s i o n s A Tthread 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/8 NPT 1/8 NPT 1/16 NPT 1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

PSxx-OMM0002CN

ON ON OFF OFF (/ /) 1 DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 5 (A/D ) 6 10 15 10 -45No.PS-OMM0002CN-F No. 80 mA () (Er1,2) (Er1,2) (Er0,4,6,7) "HHH" "LLL" (Er3) ( ) DC12~24V10% DC12~24V10% (Er0,4,6,7) 7 (HHH) (LLL) 10 () (Er3) DC12~24V10% DC12~24V10% DC(+) DC(-) 8 -46No.PS-OMM0002CN-F No.

End Lock Cylinder Series CBG1

Number of auto switches mounted Rod boot material Symbol Models 2 pcs. 1 pc. 70C00 Nylon tarpaulin J D-C7, C8 D-B5, B6 D-H7 D-G5, K5 110C Heat resistant tarpaulin K 15mm 10mm The maximum ambient temperature for the rod boot itself. 20mm 15mm D-B59W 20mm 10mm D-H7LF 3 Series CBG1 Rubber Bumper Type: CBG1BN With rear lock: CBG1BN Bore size Stroke H MM H GA GB Width across flats B1 2-Rc

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Modular Type Regulator Series AR

Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note