Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

VEX1

Description VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX370-10 12 VEX390-14 20 Air operated Bracket (With bolt and washer) Foot (With bolt and washer) B VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX3-32-2A Pilot exhaust port P2 silencer Note) N AN120-M5 AN210-02 Note) Only with solenoid.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

2 Phase Stepper Motor/Without Motor Brake Series LXP

200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without Motor Brake Series LXP Dimensions/LXPB2BC Scale: 30% The dimension inside [ ] shows the location at which the home position switch operates. 9 10 [16.5] 10 4-M6 x depth 10 Section C 21.5 18

HRX-OM-M091

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRS Series 2-18 HRX-OM-M091 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

HRX-OM-Q033

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRSH Series 2-18 HRX-OM-Q033 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

HRX-OM-S010

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRS100/150 Series 2-18 HRX-OM-S010 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

Series 11-MXJ Air Slide Table

11-MXJ4 11-MXJ6 11-MXJ8 2 13 8 18 18 4.5 4.5 7 13 8 18 18 22 4.5 4.5 3.5 2.5 14 13 8 9 18 18 29 29 3.5 3.5 4.5 4.5 Auto Switch Mounting When using the solid state auto switch (D-M9), mount it in the illustrated direction.

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

RSH/RS1H

18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

MHS

16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(J)3-40DA MHSH(J)3-40DB M50.8 3.2 10 MHSH(J)3-50DA MHSH(J)3-50DB M61 7.3 12 MHSH(J)3-63DA MHSH(J)3-63DB M81.25 18 16 MHSH(J)3-80DA MHSH(J)3-80DB M81.25 18 16 10 MHSJ3MHSH(J)3 MHS2 Nm MHSJ3-16D MHSH3-16D M30.5 0.88 Nm MHSJ3-20D MHSH3-20D M30.5 0.88 MHS2-16D M30.5

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Air cylinder

15 11.5 15 11.5 14.5 11 11.5 8 11.5 8 18 14.5 17.5 14 100 17.5 15 21.5 19 15 12.5 15 12.5 14.5 12 11.5 9 11.5 9 18 15.5 17.5 15 (mm) Auto switch model D-F59F D-A59W D-F5NT D-P3DWA Bore size A B A B A B A B 32 10.5 7 8 4.5 15.5 12 9.5 6 40 10.5 10.5 8 8 15.5 15.5 9.5 9.5 50 12 11 9.5 8.5 17 16 11 10 63 13 12 10.5 9.5 18 17 12 11 80 18 14.5 15.5 12 23 19.5 17 13.5 100 18 15.5 15.5 13 23 20.5

240

Select a bore size in accordance with Model Selection on pages 17 and 18.

Speed Controller with One-touch Fittings Series AS In-line Type 1

28.6 33.6 6.2 50 11.4 16.5 3/16" AS2001F-05 AS2051F-06 26 30.2 35.2 6.7 53.2 12.8 6 17 14.8 21 29.5 34.5 7.1 52.2 13.2 17 1/4" AS2001F-07 AS2051F-08 31 31.5 36.5 8.1 59.8 15.2 8 18 24 29.6 34.6 6.2 52.2 11.4 16.5 3/16" AS2051F-05 AS3001F-06 18 33.3 38.3 7.4 59 12.8 6 17 14.8 26 30.5 35.5 7.1 54.4 13.2 17 1/4" AS2051F-07 AS3001F-08 21 34.1 39.1 8.2 64.4 15.2 8 18 19.8 31 31.5 36.5 8.1 59.8

MGZ Series

18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches Auto switch models Auto switch type Electrical entry D-Z7, Z80 Grommet Reed switch D-Y59, Y69, Y7P Grommet D-Y7NW, Y7PW, Y7BW Grommet (2 color indicator, with diagnostic output) Solid state switch Grommet (2 color indicator, water resistant

S070

Mounting bracket q Manifold base Solenoid valve body Mounting bracket 4-11-17 18 Series S070 Specific Product Precautions 2 Be sure to read before handling. 2. Body ported manifold type q Remove the clip on the position where the station is to be added by pulling it in the direction indicated by the arrow.

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

P

10 14.5 4.5 U40 40 43 7 18 13.7 18.5 6.5 U50 50 53 7 18 14.7 19.5 7.5 Model Nom.size D10 A 10 ZP10Dl B 12 C 4 D 13 E 10.7 F 15 Y 6 Put in the symbol for material at the end of model no.