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For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

2 2 2 2 4 MY16-16AStroke MY2H16-16BStroke 4 x 1.8 x 1.1 D-X MY2B16-PS MY2B25-PS MY1B40-PS Individual -X Seal kit includes @2, %0, %1, %2 and %3.

13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N:

Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

point RC (Left arm) RA (Dual arm) RB (Right arm) PD0.05 PB0.02 LA0.1 LB L PA0.02 PC0.05 N 2 x 2-PH7 Depth D 2 x 2 x NPT 1/4 G 2 x 2 x MM Depth J E B RD (mm) Bore (mm) B C D E GA GB GC J L LA LB MM N P 50 63 80 12 15 12 95 112 154 48 54 76 13.7 16.6 19.6 134.3 141.2 185.8 138.5 147.5 199 93 90.5 137.5 12 12 18 376.7 395.6 530.9 149.5 158.5 214 78.4 78 113.7 19 22 30 8 10 12 M8 x 1.25 M10

2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (10mm) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) 11-5 3 5-2 IDFB55E/75E-46 IDFB Series 11-5 11-3 IDX-OM-W035 11 T 11-6 IDFB22E/37E-23 IDFB22E-11 GFCI GFCI R R N L TB1 PE 2 1 3 N L 3 PE 2 1 TB1 MC TDR MC TDR MC C1 MC

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) 70 Lateral load F (N) 60 0.4 MPa 50 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 40 30 20 2.

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

1/8 PA 86.3 78.3 2(A) 2(A) 63 19 Rc 1/2 n: Station n L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 5-5-24

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( ) Refer to "Flow Rate Setting Mode

piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147

l+ T 2 Position Double Solenoid ^AITIITNTM n s l / . l . t h \ i k ' 1 i '11 "JITT|T|.,tT7TfIt-1Vr1 u' "-11h1'\lr dITl\Ih Ll.1'rl+ 'fl 2 Position 2 Position Single Solenoid Double Solenoid 2 Position Single Solenoid orrn-nm^ ^lTriinT.^ dllJ*#lr.F @ll'+*l=\l-o MlTF'lfilir @ t / , t . , , 1 . \ 1 d -TITl !

4 Dimensions MXZ12 Page 7 MXZ16 Page 8 2 Compact Cylinder with Linear Guide MXZ Series 12, 16, 20, 25 RoHS How to Order MXZ 20 20 M9BW Bore size Number of auto switches 12 12 mm 16 16 mm 20 20 mm 25 25 mm Pilot port location Nil 2 S 1 n n Front Nil * The number of auto switches that can be mounted depends on the bore size and the port location of the product.s P. 16 Pilot port Right Auto

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Mounting Position With 2 stations, the bracket is mounted on the second sensor from the left. 1 2 1 2 Left Right 1 2 MPa MPa MPa MPa MPa MPa With n stations, the bracket is mounted on the first and n th sensor from the left. 1 2 n MPa MPa MPa Addition of Manifold Stations 1.

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

Key selector (2 position) VZM450-01-36 Panel mounting hole JIS Symbol (Pilot exhaust port) 0.5 MPa supply Key can be removed at the on and off positions. 26 N F.O.F. 2-3.5 mounting hole 90 T.T.