Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

Fluoropolymer Piping Equipment

Metric size Inch size Series Appearance Class LVW 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 1 2 3 4 5 6 7 LQ1 Union reducing LQ3U-R LQ3 LQ3 : B side : A side LVN P.925 LQHB 1 2 3 4 5 6 : A side Union elbow reducing LQ3E-R TL TIL : B side TLM TILM P.926 TD TID 1 2 3 4 5 6 : B side Union tee reducing LQ3T-R TH TIH : C side : A side P.927 Note) : A side tubing O.D.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

4-4.5 (For mounting) 9 + 45.6 13.4 + + 2.5 2.5 12.5 15.2 2 123 [127.4] 107 [111.4] 10 18.5 23.5 One-touch fitting 6, 1/4" (A, B port) R P R R P R 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] 65 Applicable tubing O.D.: 4, 5/32", 6, 1/4" 82.8 16.5 + + + + + (3.2) Triangle mark 52.8 1/8 (P, R port) (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 48.6

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Multi-channel Digital Sensor Monitor ( compatible)

2 R/W5 PinCode 0x0 ~ 0x03E7 (Security code) Y U16 (0) (0 ~ 999) Process data 0x1F40 0x1F41 0x1F42 0x1F43 Conversion formula Inclination a 0 R N F32 (8000) (8001) (8002) (8003) Refer to table "Inclination and intercept to the unit specification".

-fl Seies

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

Air Pilot Operated Series NVSA

I I +.--' +-\ ae " "f -a1-a -; l-nr l : r #4E'ii rffi:-i,=' .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

VQ7-6/7-8

+ 0.77 (n: stations) Rc3/8 Rc1/2 Rc1/2 Rc3/4 22 Series VQ7-8 DIN Connector Type VV72-142 118 142 118 9 2n-Rc3/8, 1/2 67 20 Indicator light 14 34 9 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

SI Unit for Vacuum Manifold

(DeviceStatus : Failure) Valve has a short circuit. Pressure sensor has a short circuit. Pressure sensor has a failure or a disconnection. No connection or a disconnection between the SI Unit and vacuum manifold. There is a firmware error. Red ON ST One of the following may have occurred.

AC Servo Motor Driver (CC-Link Type ）

Driver Servo amplifier For transistor EMG, etc. 5.6k Approx. 5mA Switch TR DICOM VCES 1.0V ICEO 100 A 24VDC 10% 150mA (2) Digital output interface DO-1 A lamp, relay or photocoupler can be driven. Install a diode (D) for an inductive load, or install an inrush current suppressing resistor (R) for a lamp load.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

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_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A

Digital Flow Switch (Integrated display type)

(Page 74) 8000 0x1F40 0 R PD conversion equation : a F32 N Refer to "Inclination and intercept".