Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VK300

Flow rate characteristics Flow Rate Characteristics/Weight VV100 Weight (g) 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Operating pressure range (MPa) Port size Valve model C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13

PFxx-OMO0004CN

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

240

Note 2) When changing the port location, please order a new port plug: MXH-P (2 pcs.)

9.8

NPT1/8 Piping adapter Option 1 Made to Order Output specifications Without lead wire A B C E NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage PNP open collector 1 output + Analog voltage Nil Made to Order Lead wire with connector (Lead wire length: 2 m) With connector cover Unit specifications Note 1) Under the New Measurement Law, sales

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

PSxx-OMF0005CN

DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (

20

Features 4 RoHS Blow Gun Series VMG How to Order VMG1 1 02 32 W C With nozzle cover (Only for male thread nozzle, 6 extension nozzle) Piping entry Bottom Top 1 2 C CF None With nozzle cover/HNBR With nozzle cover/Fluororubber Body color Nozzle White Dark blue W BU Type Symbol Nozzle part no.

PF-OMN0009_C

1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Parallel Type Air Gripper

Specifications 2. Operating method or operation 2-1. Design precautions 2-2. Selection 2-3. Mounting 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1. Precautions 3-2. Replacement of Dust Cover (MHZJ2 / MHZAJ2 Only) 3-3. Construction / Parts list, seal listMHZ2-6 3-4. Construction / Parts list, seal listMHZJ2-6 3-5.

VHK

Series VHK How to Order 2 VHK R L 02S 02S 2 R R L C VHK 04F 04F Flame resistant type Flame resistant cover Nil No Bracket Valve model With cover (For One-touch fitting only) L Nil With L-bracket None C 2 port valve 2 3 port valve 3 Flame resistant type Bracket and screws are attached. 1(P) port size 4 04F 1(P) nob color 6 06F Gray Nil (Standard) Blue 2 port valve 3 port valve 2(A) port size

VFRA3000

pressure range (MPa) 2 position double 2 position single (0.6 x P + 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position (0.6 x P + 0.1) to 0.9 P: Operating pressure Ambient and fluid temperature (C) 10 to 60C (No freezing.

Air Cylinder

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

Pressure Relief 3 Port Valve With Locking Holes

2 - (2) Double action type VHS4510~5510 VHS3510 VHS2510 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M Z VHS2510 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 3.2 VHS3510 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 3.2 VHS4510 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 4.2 VHS4510-06 3/4 1/2 110.4 42 75 63 22 58 44

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Moisture Control Tube

Correction Factor C1 for Supply Air Dew Point Kv: Volume ratio Vt : Piping volume (mm3) Vc: Actuator volume (mm3) Kv = q Vt Vc Correction factor C1 2 Supply air dew point (C) 10 Vt : Piping volume (mm3) [can be selected from piping volume chart in Fig. 2.] d : Tube I.D.

Steam Valve

) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5