XLG Series

(Take care not to damage the mounting surface of the body.) 3 Tightening torque Nm Valve size 2 1 -25 XLG-16 0.7 1.5 4 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 Wipe any dust off the O-ring surface and O-ring seat with a clean cloth (Bemcot TM) dipped into ethanol. Tighten the socket head cap screws in numerical order.

Parallel Type Air Gripper

Replacement part/Grease pack part no.: GR-S-010 (10 g) 15 - 3-6. Construction / Parts list, seal list MHZAJ2-6 Double acting/ Finger open Single acting / Normal open Single acting / Normal closed Double acting/ Finger closed Components Components No. Description Material Remarks No.

MHT2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the product mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series.

3-Position Rotary Table

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 297 MSZ

MHT2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the product mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

KK/KK13

An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 15 Series KK/KK13 Common Precautions 1 Be sure to read before handling. Mounting Selection Warning Caution 1. Before mounting confirm the model and size, etc. Also, confirm that there are no blemishes, nicks or cracks in the product. 2.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up

S070

258-9200-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15

VK300

Ambient and fluid temperature Response time (at 0.5 MPa) (1) 10 ms or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

0.1 Note) VKF33: Add 10 g to each when equipped with bracket. 4-13-4 5 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Standard Specifications Direct operated type 2 position single solenoid Air Max. 50C Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5 MPa) Manual override(1) Valve specifications Electricity specifications 10 ms or less (Standard), 15

ALF400 to 900, ALT-5/-9

flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

AIR SLIDE TABLE

M61 7.4 7 12 MXQ16B M61 7.4 10 15 MXQ20B M81.25 18 14 20 MXQ8C M40.7 2.1 6 9 MXQ12C M50.8 4.4 8 12 Caution Types other than MXQ20(A) and MXQ25(A) have through tapped hole Use the bolt shorter than max. screw depth (L2) by 0.5mm or more.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

, 20, 25, 30 6, 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to page 516.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

With M3 port 23 mm x 15 mm x 10 mm 9.5 g Variations Page 622 Page 622 Page 631 MHC2-6 6 MHCA2-6 6 MHCM2-7S 7 Model Cylinder bore Double acting Single acting (Normally open) 30 to 10 0.038 Nm (Double acting) 0.024 Nm (Single acting) Action Single acting (Normally open) Opening/Closing angle (Both sides) 20 to 7 Holding moment (at 0.5 MPa) 0.017 Nm 0.02 mm 180 c. p.m 19 g Repeat ability Maximum

Toggle Type Air Gripper

Shim 647 A Series MHT2 Dimensions 2 x M6 x 1 thread depth 15 Mounting thread 20 MHT2-32DZ 34 68 50 4 x M6 x 1 thread depth 10 Mounting thread 42 32 16 8 4 x M6 x 1 thread depth 10 Mounting thread (Both sides) 5.5 5.5 15 0.1 0 Closed 3 Open 28 34 0.2 4.5 86 74 45 18 1.6 34 0.2 22 (123.6) 48 41.6 28 12 8 46 Rc (G , NPT ) 1 8 1 8 1 8 2 x M6 x 1 thread depth 15 Mounting thread Finger closing

ISA2

Removal of cover Hook the finger on the front cover ridge and rotate it in the direction of the OPEN arrow until it stops (15). Then pull out and remove the cover. Throttle setting for blowing to prevent water and cutting oil from entering the nozzle. (Clockwise: Close throttle; Counterclockwise: Open throttle) IF Data The setting is not applicable to valves without throttle. 1.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

ZSE F/ISE

Item Reference page 16-2-30 Output type Example of internal circuit and wiring 16-2-31 Auto shift function, Anti-chattering function 16-2-32 Measures to be taken when error occurs 16-2-33 16-2-38 15 Series ZSE60F/ISE60 High Precision, Digital Pressure Switch for General Fluids Dimensions Bracket A A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering

ZSM1-115/121

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. 15 kPa Max. 20 kPa Hysteresis 10% or less Repeatability ZSP 5 to 60C (No freezing) Ambient and fluid temperature ISA2 4.5 to 28 VDC 100 VAC/DC or less Supply voltage ON: When output is ON.