EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Rotary Angle Theoretical Output Operating pressure (MPa) Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2 2 3 3.7 4.9 6 8 10.5 12.5 16.5 19.6 28 31.2 80 to 100 (9010) R type 0.3 24 33 45 60 60.8 90.2 112 149 182 243 319 380 502 596 851 948 0.5 40 55 75 100 100

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted

VCB

E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

*The D-A9ll/M9lll auto switches are shipped together, (but not assembled).

MX-OMP0051

50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 D-M9V/M9WV A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2 2.6 5.6 7.6 7.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 7.1 7.1 7.1 13.1 30.1 7.1 MXQ12(A,C) 16.5 16.5

PEAPP Series

500 1,000 100 250 500 1,000 100 250 500 1,000 100 250 * 500 1,000 100 250 * 500 100 250 500 1,000 100 250 500 1,000 100 250 500 100 250 500 0.6 1.5 3 6 1.1 2.75 5.5 11 1.5 3.75 7.5 15 2.1 5.25 10.5 21 2.5 6.5 13 1.2 3 6 12 2.3 5.75 11.5 23 3.4 8.5 17 5 12.5 25 Features: 1/4 4mm Economical and lightweight LLDPE resin provides excellent environmental stress crack resistance Six colors Excellent

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Peltier-type Chiller Thermo-con/ Compact Type

D-G

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Grounding should be to a D-class ground. (Ground resistance of 100 or less.) -13- 3. Grounding should be performed near the actuator to shorten the grounding distance. 4. The cross-sectional area of this wire shall be a minimum of 2 mm2. 5. Avoid common grounding with other devices.

HEC-OM-U015

D Level gauge K Circulating fluid OUT Set the Communication protocol.

ALF400 to 900, ALT-5/-9

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location Side ported Nil Bearing type Axial ported E High precision type A Available with side ported Free mount type only, when equipped with auto s

V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord 100 V Heavy-duty cord 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch 100 V IC circuit 48 V, 100 V 24 V or less Order example: MSUA20 single vane type (connection port side location

ALF400 to 900, ALT-5/-9

AV AU AF AR ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63 VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2