Air Slide Table

Model Stroke MXQ8(A, C) 50, 75 MXQ12(A, C) 75, 100 MXQ16(A) 100, 125 MXQ20(A) 100, 125, 150 MXQ25(A) 125, 150 MXQ6B 50, 75 MXQ8B 75, 100 MXQ12B 100, 125 MXQ16B 100, 125, 150 MXQ20B 125, 150 159 Model Selection MXQ Series Selection Example 1 (Transfer, Table Mounting) Selection Example 2 (Transfer, End Plate Mounting) Selection conditions Selected model: MXQ8B-30ZEJ Load mass: 0.3 kg Average

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5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR

CQ2

Mounting at non-rotating side Model C C' Model C D 55 60 65 70 75 80 85 90 95 100 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85

V100

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

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0 to 100 Ambient temperature (C) 0 to 60 Weight (kg) 0.09 0.23 0.42 1.00 0.86 Note 1) Contact SMC if the valve is to be used with vacuum and B A flow.

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Electric Actuator

Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] Ambient temperature 77F (25C) or less Model Lead LEY16l LEY25l LEY32l LEY16lA LEY25lA 15 85 or less 65 or less 85 100 100 50 Work load [lb] Pushing force 2.2 3.3 85% 6.6 A B C 5.5 11 65% 22 A B C 39.7 A B C 2.2 3.3 95% 6.6 A B C 2.6 5.5 95% 11 A B C 104F (40C) 9.9 19.8 85% 4 Electric Actuator/Rod Type Step Motor

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-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

Battery-less

LEYG32M LmE LEYG40M LmE Lead A B C A B C A B C A B C Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 30C or less 65 or less 100 Work load [kg] 0.5 1 2.5 1.5 4 9 2.5 7 16 5 12 26 Pushing force 65% 50% 70% 65% 40 or less 100 50 30 45 or less 60 18 15 or less 65 15 10 or less 40C LEYG25 mE M L 500 Lead 3: LEYG25 EC M

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

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400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.