9.8

Direct mounting Close mounting Claw 1 Claw 2 Mounting of DIN rail Recommended fittings M One-touch mini Hexagon socket head male connector: KJS04-M5 (Tubing O.D. 4, Connection thread M5 x 0.8) M One-touch fitting Hexagon socket head male connector: KQ2S04-M5 (Tubing O.D. 4, Connection thread M5 x 0.8) w Engage claw 1 of the product with the DIN rail as indicated by q and pull it to the direction

Microspeed Cylinder

to 7.9 in/s) Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9 in/s) 12 M6 x 1.0 M10 x 1.25 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 Female threads Rod end threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) 11 Clean Room Series Microspeed Cylinder

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MXW Non-rotating accuracy M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

VQ5000

J. S. T. Manufacturing Co., Ltd.

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

J. S. T. Manufacturing Co., Ltd.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

NAIV

NAN200,400 NAN500 -900 4.21 11071 NAN120-X200 Port size (NPT) M5 (NOM 10-32) Noise reduction lvax. operating pressure I 45 PS(10.2kg7c.rf) 40140.F (s -60.C) Operating temprature range Effective orifice mm2 (Cv) 5 (0.27) 20 0.1) .12 (3.3) \4/eight oz (g) 0.69 (17) Dimensions In.

Digital Flow Switch

Port size Symbol Port size Rated flow range 03 06 12 10 1 14 1 1/2 20 2 Output specification Symbol OUT FUNC*2 Applicable monitor unit model CS NPN Analog voltage output*3 External input*4 PFG300 series DS NPN Analog current output External input*4 PFG310 series ES PNP Analog voltage output*3 External input*4 PFG300 series FS PNP Analog current output External input*4 PFG310 series *2

AS

How to Order Made to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22 01

AS_FS Inline

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

NAN200,400 NAN500 -900 4.21 11071 NAN120-X200 Port size (NPT) M5 (NOM 10-32) Noise reduction lvax. operating pressure I 45 PS(10.2kg7c.rf) 40140.F (s -60.C) Operating temprature range Effective orifice mm2 (Cv) 5 (0.27) 20 0.1) .12 (3.3) \4/eight oz (g) 0.69 (17) Dimensions In.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

VQ4000

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-5-27 Base Mounted 28 Series VQ4000 Kit (Serial transmission unit) for I/O S 23 75.5 Mounting hole for 2-M5 8 61.5 143 10 1.6 14.5 99 32 U side 8 (128.5) L2 (In the case of DI unit, 1pc: 8 number of inputs) Min. 0 to max 4 unit (0 to 216 mm) DI unit 54 SI unit P = 25 44 n B A 8 2 4 B A C12: One-touch fitting for

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6)

VQ20/30

Class H coil: AWG18 Operating Port Tightening Torque Class B coil: AWG20 Torque (Nm) Operating port M5 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0 (1) Rc, NPT 1/8 0.8 to 1.0 SMC 2. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. 3.

JAS

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.